A new method to calibrate an atomic force microscope with the self-traceable chromium grating fabricated by atomic lithography

Gu, Zhenjie; Xiao, Deng; Cai, Yanni; Wang, Xinpan; Yang, Fan

doi:10.1117/12.2585428

Cited by 1 publication

(3 citation statements)

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“…This is called the zero crossing method and is also often used [39,41,42]. To use only points related to a special feature and throw away the rest of the structure might be not very efficient, so the centre of gravity evaluated from whole structures can be used in order to include all of the data [11,35,[41][42][43].…”

Section: Direct Space Measurementmentioning

confidence: 99%

“…Non-linearity can be detected in data processing and some methods can deal with local phase variation better than others. Non-linearities must be handled when setting up an uncertainty budget [11,35,38,52]. However, correction requires additional information and is outside the scope of the evaluation method.…”

Section: One-dimensional Grating Modelsmentioning

confidence: 99%

“…The former include crystal lattices and surface reconstructions at the atomic scale, periodic domains formed during crystal growth [1] or structures formed during phase transitions [2], stress-induced periodic wrinkle and ripple structures [3], self-assembled monolayers and colloidal films [4,5]. Lithographically prepared gratings, nanohole and nanopillar arrays are archetypal examples of the latter category [5][6][7][8], but it also includes patterns produced using laser interference techniques [9][10][11] or nanomachining [12]. All these structures are frequently characterised using scanning probe microscopy (SPM) and profilometry with the period/pitch or lattice vectors among the key parameters evaluated.…”

Section: Introductionmentioning

confidence: 99%

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Demystifying data evaluation in the measurement of periodic structures

Nečas

Yacoot

Valtr

et al. 2023

Meas. Sci. Technol.

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Periodic structures are often found in various areas of nanoscience and nanotechnology with many of them being used for metrological purposes either to calibrate instruments, or forming the basis of measuring devices such as encoders. Evaluating the period of one or two-dimensional periodic structures from topography measurements, e.g. performed using scanning probe microscopy (SPM), can be achieved using different methodologies with many grating evaluation methods having been proposed in the past and applied to a handful of examples. The optimum methodology for determining the grating period/pitch is not immediately obvious. This paper reports the results of extensive large-scale simulations and analysis to evaluate the performance of both direct and Fourier space data processing methods. Many thousands of simulations have been performed on a variety of different gratings under different measurement conditions and including the simulation of defects encountered in real life situations. The paper concludes with a summary of the merits and disadvantages of the methods together with practical recommendations for the measurements of periodic structures and for developing algorithms for processing them.

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