A new grating X-ray spectrometer for 2–4 keV enabling a separate observation of In-Lβ and Sn-Lα emissions of indium tin oxide

Abstract

A new multilayer-coated varied line-spaced grating, JS4000, was fabricated and tested for extending the upper limit of a grating X-ray spectrometer for electron microscopy. This grating was designed for 2-3.8 keV at a grazing incidence angle of 1.35°. It was revealed that this new multilayer structure enables us to take soft-X-ray emission spectra continuously from 1.5 to 4.3 keV at the same optical setting. The full-width at half maximum of Te-L(α1,2) (3.8 keV) emission peak was 27 eV. This spectrometer was applied to indium tin oxide particles and clearly resolved Sn-L(α) (3444 eV) and In-L(β1) (3487 eV) peaks, which could not be resolved by a widely used energy-dispersive X-ray spectrometer.

Chemical State Information of Bulk Specimens Obtained by SEM-Based Soft-X-Ray Emission Spectrometry

“…The X-ray path analyzed was designed for the specimen height (work distance) of 10 mm of the SEM (JSM-6480LV; JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan). Figure 1 shows a schematic section drawing of the spectrometer attached to the SEM (a) and a photo of the SXES-SEM instrument (b) (Terauchi et al, 2013). The SXES spectrometer was attached to a port for wavelength-dispersive spectrometer (WDS) of the SEM.…”

“…Recent developments in soft-X-ray emission spectroscopy (SXES) instruments for conventional transmission electron microscopes (TEMs) enable us to obtain partial density of states (DOS) of valence bands (VB) from identified specimen areas by TEM (Terauchi et al, 2012, 2013). The previous SXES spectrometer for TEM has an acceptable energy range from 50 to 4,000 eV using four varied line spacing (VLS) gratings.…”

Development of a flat-field spectrometer with a wideband Ni/C multilayer grating in the 1–3.5 keV range

“…It is similar to a supermirror reflecting X-rays having short and long wavelengths, respectively, at the bottom and top regions in the multilayer. Using TEM equipped with the soft X-ray spectrometer, the emission spectra of In-Lβ and Sn-Lα from indium tin oxide (ITO), which is well-known as transparent conducting oxides, were able to be clearly distinguished and detected, in spite of the fact that the energy difference between the peaks is 43 eV [5].…”

Experimental evaluation of enhancement of diffraction efficiency by overcoating diamond-like carbon (DLC) on soft x-ray laminar-type gratings

“…[1][2][3] The energy coverage is from 50 eV to 4000 eV by taking advantage of four laminar-type varied-line-spacing (VLS) gratings. The gratings can be retracted without breaking vacuum.…”