2007
DOI: 10.1007/s10470-007-9067-3
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A new formulation of fringing capacitance and its application to the control of parallel-plate electrostatic micro actuators

Abstract: Though the effect of fringing field in electrostatic parallel-plate actuators is a well-understood phenomenon, the existing formulations often result in complicated mathematical models from which it is difficult to determine the deflection of the moving plate for given voltages and hence, they are not suitable for accurate actuation control. This work presents a new formulation for tackling the fringing field, in which the effect of fringing field is modeled as a variable serial capacitor. Based on this model,… Show more

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Cited by 61 publications
(32 citation statements)
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“…However, for the difficulty of mathematical treatment of such a complicated system, we regard the case that only the capacitance C is an arbitrary time function while R and L are constants. As well as it is more easier to vary the capacitance than to vary resistance and/or inductance, the electronic circuits that involve a time-varying capacitance have several applications in science and technology [11][12][13][14][15].…”
Section: Introductionmentioning
confidence: 99%
“…However, for the difficulty of mathematical treatment of such a complicated system, we regard the case that only the capacitance C is an arbitrary time function while R and L are constants. As well as it is more easier to vary the capacitance than to vary resistance and/or inductance, the electronic circuits that involve a time-varying capacitance have several applications in science and technology [11][12][13][14][15].…”
Section: Introductionmentioning
confidence: 99%
“…It is practically uniform when the electrodes are parallel surfaces, except for the edges, where the fringe effect appears, which might have up to a 35% effect on the capacitance [27]. When the electrode geometry is not parallel, the field is not uniform, becoming stronger in the region where the electrodes are closer and weaker in the regions where they are more distant.…”
Section: Methodsmentioning
confidence: 99%
“…Additionally, capacitive fringing field effects have been ignored. This is a reasonable assumption as long as the electrode overlap area is much greater than the electrode separation distance squared [24]. Using (3), a nonlinear differential equation that models the PPA system dynamics can be developed: Here, m is the proof mass, typically the movable electrode, and c is the system coefficient of damping.…”
Section: Kinematics Of Ppasmentioning
confidence: 99%