Abstract:The undesired square-law characteristics in micro-electrostatic actuators and magnetic solenoids results in a limited stable range, which reduces their application fields and performance. This research investigated the isomorphic dynamics in these actuators and observed that the nonlinear drive force and the uncertain time delay are the challenges for the full range position controller design. A hybrid nonlinear control scheme includes an input-output linearization controller and a feedback posicast compensato… Show more
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