2020
DOI: 10.1007/s11082-020-02346-0
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A new approach of pH-IEGFET sensor based on the surface modification of macro porous silicon with palladium nanoparticles

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Cited by 12 publications
(4 citation statements)
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“…All XRD patterns displayed diffraction peaks at 32.8°, 38.5°, 44.7°, 65.1°, 69.2°, 72.6°, 78.3° and 88.4°. These diffraction peaks are ascribed to the Si crystalline structure 32,33 , except for two low-intensity peaks at 65.1°and 72.6° that may be related to SiO 2 [PDF#00-001-0438] due to the possible oxidation during samples transfer. The highest peak shown at 2θ = 69.2° in each substrates is attributed to Si structure and the presence of this peak in all substrates suggests that the cubic structure of the crystallized Si is preserved even after the pore creation into the Si wafer 34 .…”
Section: Resultsmentioning
confidence: 99%
“…All XRD patterns displayed diffraction peaks at 32.8°, 38.5°, 44.7°, 65.1°, 69.2°, 72.6°, 78.3° and 88.4°. These diffraction peaks are ascribed to the Si crystalline structure 32,33 , except for two low-intensity peaks at 65.1°and 72.6° that may be related to SiO 2 [PDF#00-001-0438] due to the possible oxidation during samples transfer. The highest peak shown at 2θ = 69.2° in each substrates is attributed to Si structure and the presence of this peak in all substrates suggests that the cubic structure of the crystallized Si is preserved even after the pore creation into the Si wafer 34 .…”
Section: Resultsmentioning
confidence: 99%
“…Several approaches have been considered by researchers to reduce this blistering effect by utilizing Pd nanostructures [42]. It has been reported by several researchers that the Pd nanostructure provides an improved sensing response compared to the Pd film, due to its high surface-to-volume ratio, which induces a large surface available for the interaction of Pd with surrounding hydrogen molecules [43][44][45][46][47].…”
Section: Measurement Methodsmentioning
confidence: 99%
“…Thus far, several techniques have been employed to enhance the conductivity of sensing membrane, which include doping with a variety of elements or surface decoration of nanostructures with noble metal particles [23,24]. In recent times, the sensitivity of the pH-EGFET sensor has been significantly enhanced by surface decoration of N-MacroPSi with palladium nanoparticles (Pd-NPs) [25]. A colloidal solution of metallic nanoparticles can be made by means of pulsed laser ablation in liquid (PLAL) technique.…”
Section: Introductionmentioning
confidence: 99%