A navigation grade micro-machined silicon accelerometer

Helsel, Mark P.; Gaßner, Georg; Robinson, M.; Woodruff, John P.

doi:10.1109/plans.1994.303295

Cited by 23 publications

(6 citation statements)

References 6 publications

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“…There are two main trends in gyro development [1][2][3][4][5], the first is to achieve high accuracy for inertial navigation (e.g. missile, vehicle…), and the second is miniaturisation and integration for low volume applications (e.g.…”

Section: Introductionmentioning

confidence: 99%

A Coriolis Vibrating Gyro Made of a Strong Piezoelectric Material

et al. 2007

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This paper presents a Coriolis Vibrating Gyro made of a strong piezoelectric material and designed at ONERA (The French Aerospace Lab). For many years ONERA has been developing inertial piezoelectric microsensors for vehicle attitude control and navigation (accelerometers and gyros). Despite its weak piezoelectric coefficients, quartz is used today because of its excellent mechanical and thermal properties. Gyro). It is a monolithic CVG with a tuning fork as the sensitive element. The exciting and detecting electronics of this sensor are presented as well. It has been theoretically demonstrated, that one way to enhance CVG (Coriolis Vibrating Gyro) resolution, is the use of a material with higher piezoelectric coefficient such as PZT ceramic. Thus the design and fabrication of a PZT gyro have been undertaken. The PZT gyro that has been developed during this work is called PZT VIG (Vibrating IntegratedFirst results concerning the sensor scale factor and resolution are presented and discussions are led about the comparison with theoretical expectations.

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Section: Introductionmentioning

confidence: 99%

A Coriolis Vibrating Gyro Made of a Strong Piezoelectric Material

et al. 2007

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“…A well-known example is the double-ended tuning fork (DETF) (Helsel et al 1994). Air damping is negligible at a sufficiently low pressure ($0.1 mtorr).…”

Section: Resonant Accelerometersmentioning

confidence: 99%

Accelerometers

Xie

Fedder

Sulouff

2008

Comprehensive Microsystems

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“…Micromachined accelerometers have achieved remarkable commercial success in numerous applications such as automotive technology, consumer electronics, and medical monitoring [1][2][3]. However, the accelerometers with the micro-g resolution, high sensitivity, and low manufacturing cost are still demanding especially in fields such as geophysical detection, navigation guidance system, and earthquake monitoring [4][5][6], which require new approaches to improve the performance.…”

Section: Introductionmentioning

confidence: 99%

A stiffness-tunable MEMS accelerometer

Guo¹,

Zhang²,

Zheng³

et al. 2020

J. Micromech. Microeng.

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This paper reports a novel MEMS accelerometer whose effective stiffness can be adjusted flexibly and even tuned to almost zero by using the electrostatic softening effect of two parallel plate capacitors: the comb-finger capacitor and the triangular capacitor. When applied to a biased voltage, the comb-finger capacitor provides a relatively large and nonlinear negative stiffness in the gap-varying direction, while the triangular capacitor produces a small yet linear negative stiffness in the area-varying direction. The proposed accelerometer is fabricated by using a standard silicon-on-glass manufacturing process and controlled by a customized digital circuit. An analytical model based on the pull-in dynamics as a result of the stiffness tuning is developed and simulated to investigate the dynamic behavior of the nonlinear accelerometer system. The proportion integral differential controller is utilized to improve the performance of the accelerometer while maintaining the stability of the closed-loop system operating with extremely low effective stiffness. The experimental results indicate that a two-fold increase of the sensitivity, a 30% reduction of Allan deviation bias instability, and a 20% reduction of Allan velocity random walk are achieved for the open-loop accelerometer system. A 75% decrease of the standard deviation bias instability and nearly two orders of magnitude improvement of the noise floor at 1 Hz for the closed-loop accelerometer system are realized when the effective stiffness is reduced to almost zero.

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A navigation grade micro-machined silicon accelerometer

Abstract: This paper presents the initial results of AlliedSignal Inc.

Cited by 23 publications

References 6 publications

A Coriolis Vibrating Gyro Made of a Strong Piezoelectric Material

A Coriolis Vibrating Gyro Made of a Strong Piezoelectric Material

Accelerometers

A stiffness-tunable MEMS accelerometer

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