A Multipoint Method for Spindle Error Motion Measurement

Zhang, G.X.; Zhang, Y.H.; Yang, Suo; Li, Zhitian

doi:10.1016/s0007-8506(07)60861-0

Cited by 72 publications

(39 citation statements)

References 3 publications

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“…In this case, neither the probes nor the artifact are moved, but all must be properly arranged to measure the same track on the artifact [13,[16][17][18][19][20].…”

Section: Standard Error Separation Methodsmentioning

confidence: 99%

A newly conceived cylinder measuring machine and methods that eliminate the spindle errors

Vissiere¹,

Nouira²,

Damak³

et al. 2012

Meas. Sci. Technol.

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is an open access repository that collects the work of Arts et Métiers ParisTech researchers and makes it freely available over the web where possible. AbstractAdvanced manufacturing processes require improving dimensional metrology applications to reach a nanometric accuracy level. Such measurements may be carried out using conventional highly accurate roundness measuring machines. On these machines, the metrology loop goes through the probing and the mechanical guiding elements. Hence, external forces, strain and thermal expansion are transmitted to the metrological structure through the supporting structure, thereby reducing measurement quality. The obtained measurement also combines both the motion error of the guiding system and the form error of the artifact. Detailed uncertainty budgeting might be improved, using error separation methods (multi-step, reversal and multi-probe error separation methods, etc), enabling identification of the systematic (synchronous or repeatable) guiding system motion errors as well as form error of the artifact. Nevertheless, the performance of this kind of machine is limited by the repeatability level of the mechanical guiding elements, which usually exceeds 25 nm (in the case of an air bearing spindle and a linear bearing). In order to guarantee a 5 nm measurement uncertainty level, LNE is currently developing an original machine dedicated to form measurement on cylindrical and spherical artifacts with an ultra-high level of accuracy. The architecture of this machine is based on the 'dissociated metrological technique' principle and contains reference probes and cylinder. The form errors of both cylindrical artifact and reference cylinder are obtained after a mathematical combination between the information given by the probe sensing the artifact and the information given by the probe sensing the reference cylinder by applying the modified multi-step separation method.

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“…In this case, neither the probes nor the artifact are moved, but all must be properly arranged to measure the same track on the artifact [13,[16][17][18][19][20].…”

Section: Standard Error Separation Methodsmentioning

confidence: 99%

A newly conceived cylinder measuring machine and methods that eliminate the spindle errors

Vissiere¹,

Nouira²,

Damak³

et al. 2012

Meas. Sci. Technol.

View full text Add to dashboard Cite

show abstract

“…• Multi-probe method: this method uses at least three probes to simultaneously measure error components. In this case, neither the probes nor the artifact are moved, but all must be properly arranged to measure the same track on the artifact [13,[16][17][18][19][20]. • Multi-step method: this method requires many measurements for each spindle error component.…”

Section: éTalon éTalon éTalon éTalon éTalonmentioning

confidence: 99%

Broadband superluminescent diodes with bell-shaped spectra emitting in the range from 800 to 900 nm

Андреева¹,

Il'ichenko²,

Kostin³

et al. 2013

Quantum Electron.

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Advanced manufacturing processes require improving dimensional metrology applications to reach a nanometric accuracy level. Such measurements may be carried out using conventional highly accurate roundness measuring machines. On these machines, the metrology loop goes through the probing and the mechanical guiding elements. Hence, external forces, strain and thermal expansion are transmitted to the metrological structure through the supporting structure, thereby reducing measurement quality. The obtained measurement also combines both the motion error of the guiding system and the form error of the artifact. Detailed uncertainty budgeting might be improved, using error separation methods (multi-step, reversal and multi-probe error separation methods, etc), enabling identification of the systematic (synchronous or repeatable) guiding system motion errors as well as form error of the artifact. Nevertheless, the performance of this kind of machine is limited by the repeatability level of the mechanical guiding elements, which usually exceeds 25 nm (in the case of an air bearing spindle and a linear bearing). In order to guarantee a 5 nm measurement uncertainty level, LNE is currently developing an original machine dedicated to form measurement on cylindrical and spherical artifacts with an ultra-high level of accuracy. The architecture of this machine is based on the 'dissociated metrological technique' principle and contains reference probes and cylinder. The form errors of both cylindrical artifact and reference cylinder are obtained after a mathematical combination between the information given by the probe sensing the artifact and the information given by the probe sensing the reference cylinder by applying the modified multi-step separation method.

show abstract

“…Moreover, the edge shape is expected to vary as a function of the product shape and mass. The multi-probe method [19,20] was hereto selected as an in-process calibration method. Extensive simulations have shown that sufficient accuracy can be obtained with this method [1], but quality of the air-bearing spindle is such that implementation in practice has not yet been done.…”

Section: Lower Metrology Framementioning

confidence: 99%