2014
DOI: 10.1109/jssc.2014.2345754
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A Monolithically Integrated Pressure/Oxygen/Temperature Sensing SoC for Multimodality Intracranial Neuromonitoring

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Cited by 31 publications
(7 citation statements)
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“…Photolithographic patterning and dry etching were then used to accurately define the membrane areas across the wafer. Together this novel combination of processes significantly improved manufacturability compared to previously described microfabricated oxygen sensors that used die-level drop cast Nafion membranes that were not annealed [21,23,28].…”
Section: Discussionmentioning
confidence: 94%
See 1 more Smart Citation
“…Photolithographic patterning and dry etching were then used to accurately define the membrane areas across the wafer. Together this novel combination of processes significantly improved manufacturability compared to previously described microfabricated oxygen sensors that used die-level drop cast Nafion membranes that were not annealed [21,23,28].…”
Section: Discussionmentioning
confidence: 94%
“…This enables the device to be fully solid-state. Several other designs of microfabricated electrochemical oxygen sensors have previously been described [18][19][20][21][22][23][24][25][26][27][28][29][30][31], highlighting the broad interest in this technology. However, to date no design has been reported that is not only amenable to wafer-level CMOS post-processing, and integrated with a stable on-chip RE and membrane, but also successfully validated in an implantable application.…”
Section: Introductionmentioning
confidence: 99%
“…Recent research reviews have shown that environmental sensors are mostly resistive or capacitive [17] and conventional healthcare sensors are typically measured based on voltage or current [18]. Therefore, this paper proposes a heterogeneous multi-sensor interface that is implemented with two chips: an environmental sensor readout integrated circuit (E-ROIC) for resistive and capacitive sensor types and a healthcare sensor readout integrated circuit (H-ROIC) for voltage and current sensor inputs.…”
Section: Multi-sensor System Architecturementioning
confidence: 99%
“…This is a polymer with ionic properties that contains hydrated channels capable of conducting protons [1]. It has been reported as a suitable electrolyte membrane in electrochemical sensors that detect dissolved oxygen [2]- [4], however little has been reported about microfabrication of Nafion membranes. In order to explore this issue quantitatively, we report the use of test structures to characterize and optimize the design and patterning of Nafion.…”
Section: Introductionmentioning
confidence: 99%