A model of carbon-nanotube growth-rate limitation on thin-film catalysts

“…Carbides of the metal emerge in this solution, and diffuse and decompose at the nucleation site of the CNTs. 5,6 The catalyst can form islands or particles on the substrate surface. The size of these islands determines the diameter and other properties of CNTs.…”

Section: Introductionmentioning

confidence: 99%

Formation of nanoparticles of bi-metallic catalysts for the growth of carbon nanotubes

Saurov¹,

L’vov

Bulyarskiy³

et al. 2022

J. Mater. Chem. C

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“…Углеродные нанотрубки (УНТ) находят широкое применение в микро-и наноэлектронике [1]. Рост вертикальных массивов углеродных нанотрубок на подложках методом Chemical Vapor Deposition (CVD) происходит с участием катализаторов, обычно, нанесенных на барьерные слои [2,3]. Результаты многочисленных исследований установили [4], что морфология, диаметр и скорость роста углеродных нанотрубок определяются катализатором [5,6].…”

Section: Introductionunclassified

Влияние Шероховатости Барьерного Слоя На Формирования Наночастиц Катализатора Роста Углеродных Нанотрубок

Булярский¹,

Дудин²,

Литвинова³

et al. 2023

Физика Твердого Тела

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This article compares TiN layers produced by electron beam evaporation (EBE) and atomic layer deposition (ALD) for the effect of barrier layer deposition technology on the formation of carbon nanotube (CNT) growth catalyst nanoparticles. The layers obtained by EBE have a roughness 1.5 times higher than the layers deposited by the ALD method (Ra = 1 nm and Ra = 0.6 nm). Nanoparticles formed on the surface of the EBE layer are characterized by a large average size (about 30 nm) and a 1.3 times greater dispersion of the distribution compared to nanoparticles formed on the ALD layer. TiN layers obtained by EBE are characterized by better surface wettability in comparison with ALD layers. The contact angle for catalyst nanoparticles on the surface of the EBE layer of TiN is about 30 degrees and approaches 90 degrees for ALD layers. Catalyst spreading is due to the Wenzel model. It is shown that the higher surface roughness of the EBE samples is associated with the crystallization of TiN, since the layer formation process proceeds at a higher temperature compared to the ALD process. For this reason, the use of barrier layers obtained by the ALD method is preferable for the formation of CNT growth catalyst nanoparticles on their surface.

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“…The technological process implies formation of CNTs on the surface of nanosized catalyst particles from vapour phase. Commonly, the catalyst particles are formed from a transitive metal film deposited on silicon substrate with a buffer layer [1][2][3] that prevents interaction of silicon and the catalyst [4][5][6][7][8][9]. Interaction of the metal film and silicon substrate can cause formation of silicides and silicates that cannot play the role of catalyst for CNT growth [3,[7][8][9].…”

Section: Introductionmentioning

confidence: 99%

“…Commonly, the catalyst particles are formed from a transitive metal film deposited on silicon substrate with a buffer layer [1][2][3] that prevents interaction of silicon and the catalyst [4][5][6][7][8][9]. Interaction of the metal film and silicon substrate can cause formation of silicides and silicates that cannot play the role of catalyst for CNT growth [3,[7][8][9]. Therefore, addition of buffer layer prevents decreasing of active catalyst.…”

Section: Introductionmentioning

confidence: 99%

Kinetics of nickel particle formation on silicon substrate with a buffer layer of niobium nitride

L’vov

Bulyarskiy²,

Gusarov³

et al. 2020

J. Phys.: Condens. Matter

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The size, form and distribution function of catalyst particles define the quality of synthesized arrays of carbon nanotubes. In this work, we study the kinetics of catalyst particle formation from the thin nickel film (9 nm) deposited on the silicon substrate (SiO 2 /Si) with a buffer layer of niobium nitride at the temperature of 880 • C. In the experiment, we have obtained the time dependences of the average radius, average height and concentration of nickel particles. The experimental data are satisfactorily described by simulations based on the wetting transition theory. Comparison of the simulation results and experimental data allows us to estimate the effective interaction potential between the nickel film and buffer layer of niobium nitride. Besides, we have estimated the viscosity of the nickel confirming an undercooled liquid state of the nanosized nickel film at the temperature of 880 • C.

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A model of carbon-nanotube growth-rate limitation on thin-film catalysts

Cited by 10 publications

References 2 publications

Formation of nanoparticles of bi-metallic catalysts for the growth of carbon nanotubes

Formation of nanoparticles of bi-metallic catalysts for the growth of carbon nanotubes

Влияние Шероховатости Барьерного Слоя На Формирования Наночастиц Катализатора Роста Углеродных Нанотрубок

Kinetics of nickel particle formation on silicon substrate with a buffer layer of niobium nitride

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