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2013
DOI: 10.1109/tmtt.2013.2250992
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A Miniaturized Broadband Multi-State Reflectometer Integrated on a Silicon MEMS Probe for Complex Permittivity Measurement of Biological Material

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Cited by 39 publications
(21 citation statements)
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“…Several millimeter-wave VNA systems have been recently demonstrated in the literature [2], [3]. Furthermore, the increased operating frequencies of VNAs have enabled the realization of compact sensors that are used for the measurement of the complex permittivity of organic materials, examples of such systems have already been demonstrated in the literature [4]- [6].…”
mentioning
confidence: 99%
“…Several millimeter-wave VNA systems have been recently demonstrated in the literature [2], [3]. Furthermore, the increased operating frequencies of VNAs have enabled the realization of compact sensors that are used for the measurement of the complex permittivity of organic materials, examples of such systems have already been demonstrated in the literature [4]- [6].…”
mentioning
confidence: 99%
“…The probe has been fabricated using Si MEMS technology, which facilitates miniaturization and integration. For permittivity measurement, a multi-state reflectometer (MSR) has been employed as a detection circuits and integrated on the detection probe platform [12]. Based on the work of [1] and [4], the integrated probe is designed to operate in a broadband frequency covering both 2 and 16 GHz.…”
Section: Active Integrated Probesmentioning
confidence: 99%
“…Hence, they are easy to integrate and are adequate for high frequencies [4], [5]. Due to these advantages multiport measurement systems found a wide range of application from radars [6] or microwave receivers [7], [8] to systems for material properties monitoring [9], [10].…”
Section: Introductionmentioning
confidence: 99%