A Miniature LiDAR With a Detached MEMS Scanner for Micro-Robotics

Wang, Dingkang; Xie, Huikai; Thomas, Lenworth; Koppal, Sanjeev J.

doi:10.1109/jsen.2021.3079426

Cited by 26 publications

(15 citation statements)

References 16 publications

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“…[ 48 ] The SEM image of the fabricated MEMS mirror is shown in Figure 4e. In a follow‐up research study by the same group, [ 10 ] a miniature LiDAR with a detached MEMS scanner has been demonstrated. The MEMS mirror has a weight of only 10 g, and dimensions of 36 mm × 30 mm × 13 mm.…”

Section: Conventional Solid‐state Lidar Sensormentioning

confidence: 99%

“…Compared with more mature radio detection and ranging (RADAR) technology, LiDAR makes use of optical wave, which is at shorter wavelength regime compared with radio wave, DOI: 10.1002/lpor.202100511 and hence has potential to achieve higher precision in 3D sensing. LiDAR has been widely applied in metrology, [1][2][3] environment monitoring, [4][5][6] archaeology, [7,8] robotics, [9,10] and shows high potential to be used for autonomous driving. [11][12][13] The demand for advanced LiDAR technology in the fast-growing autonomous driving industry can be induced from the appearance and growth of startup companies in this area.…”

Section: Introductionmentioning

confidence: 99%

mentioning

confidence: 99%

See 2 more Smart Citations

A Progress Review on Solid‐State LiDAR and Nanophotonics‐Based LiDAR Sensors

Xue

et al. 2022

Laser & Photonics Reviews

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Light detection and ranging (LiDAR) sensors enable precision sensing of an object in 3D. LiDAR technology is widely used in metrology, environment monitoring, archaeology, and robotics. It also shows high potential to be applied in autonomous driving. In traditional LiDAR sensors, mechanical rotator is used for optical beam scanning, which brings about limitations on their reliability, size, and cost. These limitations can be overcome by a more compact solid‐state solution. Solid‐state LiDAR sensors are commonly categorized into the following three types: flash‐based LiDAR, microelectromechanical system (MEMS)‐based LiDAR, and optical phased array (OPA)‐based LiDAR. Furthermore, advanced optics technology enables novel nanophotonics‐based devices with high potential and superior advantages to be utilized in a LiDAR sensor. In this review, LiDAR sensor principles are introduced, including three commonly used sensing schemes: pulsed time of flight (TOF), amplitude‐modulated continuous wave TOF, and frequency‐modulated continuous wave. Recent advances in conventional solid‐state LiDAR sensors are summarized and presented, including flash‐based LiDAR, MEMS‐based LiDAR, and OPA‐based LiDAR. The recent progress on emerging nanophotonics‐based LiDAR sensors is also covered. A summary is made and the future outlook on advanced LiDAR sensors is provided.

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Section: Conventional Solid‐state Lidar Sensormentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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A Progress Review on Solid‐State LiDAR and Nanophotonics‐Based LiDAR Sensors

Xue

et al. 2022

Laser & Photonics Reviews

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“…Based on the differences in their operating mechanisms, these methods can be broadly divided into two categories: mechanical and non-mechanical. Mechanical varifocal scanning methods include the microelectromechanical [ 5 , 6 , 7 , 8 ], servo motor [ 9 , 10 , 11 , 12 ], piezoelectric elements [ 13 , 14 ], manual movement [ 15 ], and external force [ 16 ]. However, for the mechanical varifocal scanning methods, the focal length variation is small, and the scanning range is difficult to expand [ 17 ].…”

Section: Introductionmentioning

confidence: 99%

A Compact Two-Dimensional Varifocal Scanning Imaging Device Actuated by Artificial Muscle Material

et al. 2023

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This paper presents a compact two-dimensional varifocal-scanning imaging device, with the capability of continuously variable focal length and a large scanning range, actuated by artificial muscle material. The varifocal function is realized by the principle of laterally shifting cubic phase masks and the scanning function is achieved by the principle of the decentered lens. One remarkable feature of these two principles is that both are based on the lateral displacements perpendicular to the optical axis. Artificial muscle material is emerging as a good choice of soft actuators capable of high strain, high efficiency, fast response speed, and light weight. Inspired by the artificial muscle, the dielectric elastomer is used as an actuator and produces the lateral displacements of the Alvarez lenses and the decentered lenses. A two-dimensional varifocal scanning imaging device prototype was established and validated through experiments to verify the feasibility of the proposed varifocal-scanning device. The results showed that the focal length variation of the proposed varifocal scanning device is up to 4.65 times higher (31.6 mm/6.8 mm), and the maximum scanning angle was 26.4°. The rise and fall times were 110 ms and 185 ms, respectively. Such a varifocal scanning device studied here has the potential to be used in consumer electronics, endoscopy, and microscopy in the future.

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“…Microrobots on a single chip with both electric and mechanical parts are categorized as MEMS microrobots [5,6]. MEMS based system is designed on the basis of their actuation, sensing, structural, and electronic circuit.…”

Section: Introductionmentioning

confidence: 99%

Comparative Study to Analyze MEMS Based Microrobot Using Fuzzy TOPSIS Approach

Oad

Tayyaba

Ashraf

et al. 2022

Mathematical Problems in Engineering

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With the emergence in the field of developing small-scale systems, microrobots are gaining enormous attention due to their small size, wide number of application, and negligible effects on the surrounding. MEMS and microrobots both have electrical and mechanical parts which are situated on a single device and chip. This makes MEMS based microrobots and an excellent device due to its ease of fabrication and small size. MEMS-based microrobots have a wide number of applications in the field of bio-medical special drug delivery and invasive surgery. These tiny robots can be sent into the human body to send any medicine inside the human body. Various types of MEMS based microrobot can be used in drug delivery applications including magnetic nanoparticles based microrobots, magnetized spirulina microrobot, and electro-magnetic microrobots. However, the suitability of all these robots for drug delivery applications depends on the locomotion, navigation controlling, shape transformation, actuation requirement, and amount of drug wasted before moving to the destination. In this work, fuzzy rules based system is performed to confirm the dependence of the parameters including the locomotion, navigation controlling, shape transformation, actuation requirement, and amount of drug wasted on the working of microrobots in drug delivery applications. Similarly, fuzzy TOPSIS based study is performed to compare and analyze the most suitable microrobot for drug delivery application. Piezo-electric and electro-magnetic microrobots are considered the most suitable option with relative closeness to the ideal solution of 0.71 and 0.66, respectively, owing to their better shape transformation and movement.

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A Miniature LiDAR With a Detached MEMS Scanner for Micro-Robotics

Cited by 26 publications

References 16 publications

A Progress Review on Solid‐State LiDAR and Nanophotonics‐Based LiDAR Sensors

A Progress Review on Solid‐State LiDAR and Nanophotonics‐Based LiDAR Sensors

A Compact Two-Dimensional Varifocal Scanning Imaging Device Actuated by Artificial Muscle Material

Comparative Study to Analyze MEMS Based Microrobot Using Fuzzy TOPSIS Approach

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