A Micropower $\Delta\Sigma$-Based Interface ASIC for a Capacitive 3-Axis Micro-Accelerometer

Paavola, M.; Kamarainen, M.; Laulainen, Erkka; Saukoski, M.; Koskinen, Lauri; Kosunen, Marko; Halonen, K.

doi:10.1109/jssc.2009.2031059

Cited by 58 publications

(13 citation statements)

References 19 publications

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“…The input range of the accelerometer is AE0:7 g, which is limited by the power supply. The measured specifications of the AEÁ micromachined accelerometer are compared with previously reported electromechanical AEÁ modulators based on a representative figure of merit (FOM) (shown in Table I), which is given by [9]:…”

Section: Measurement Resultsmentioning

confidence: 99%

Design analysis of a high-Q micromechanical capacitive accelerometer system

Chen

2017

IEICE Electron. Express

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A micromechanical capacitive accelerometer system is analyzed in this paper, which includes a high-Q sensing element and a high-order switched-capacitor (SC) sigma-delta ΣΔ CMOS interface circuit. The high-Q high-order topology obtained a sub-µg/√Hz noise floor. The loop stability is implemented by the operation of electrostatic feedback force, heavy phase compensation and the off-chip adjusting of distributed-feedback factors. The interface circuit is implemented in a standard 0.5 µm CMOS process. The system consumes 12 mW from a single 5 V supply with the noise level of lower than 400 ng/√Hz. The system bandwidth is 600 Hz and the input range of the accelerometer is ²0.7 g. The measured sensitivity of 2.5 V/g is achieved.

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Section: Measurement Resultsmentioning

confidence: 99%

Design analysis of a high-Q micromechanical capacitive accelerometer system

Chen

2017

IEICE Electron. Express

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“…In recent years, high-performance capacitive accelerometers with an accuracy of sub-μg level occupy a large market share in inertial navigation, space microgravity measurement, platform stability control and other fields. The micro-accelerometers with an open-loop output have a simple structure, but the signal bandwidth is limited by the sensitive structure and the input range of the signal is greatly reduced [2,3,4]. Therefore, the micro-accelerometers usually work in a closed-loop feedback state to obtain better linearity, dynamic range and signal bandwidth.…”

Section: Introductionmentioning

confidence: 99%

A High-Performance Digital Interface Circuit for a High-Q Micro-Electromechanical System Accelerometer

Liu

2018

Micromachines

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Micro-electromechanical system (MEMS) accelerometers are widely used in the inertial navigation and nanosatellites field. A high-performance digital interface circuit for a high-Q MEMS micro-accelerometer is presented in this work. The mechanical noise of the MEMS accelerometer is decreased by the application of a vacuum-packaged sensitive element. The quantization noise in the baseband of the interface circuit is greatly suppressed by a 4th-order loop shaping. The digital output is attained by the interface circuit based on a low-noise front-end charge-amplifier and a 4th-order Sigma-Delta (ΣΔ) modulator. The stability of high-order ΣΔ was studied by the root locus method. The gain of the integrators was reduced by using the proportional scaling technique. The low-noise front-end detection circuit was proposed with the correlated double sampling (CDS) technique to eliminate the 1/f noise and offset. The digital interface circuit was implemented by 0.35 μm complementary metal-oxide-semiconductor (CMOS) technology. The high-performance digital accelerometer system was implemented by double chip integration and the active interface circuit area was about 3.3 mm × 3.5 mm. The high-Q MEMS accelerometer system consumed 10 mW from a single 5 V supply at a sampling frequency of 250 kHz. The micro-accelerometer system could achieve a third harmonic distortion of −98 dB and an average noise floor in low-frequency range of less than −140 dBV; a resolution of 0.48 μg/Hz1/2 (@300 Hz); a bias stability of 18 μg by the Allen variance program in MATLAB.

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“…In this application, except for the criteria mentioned above, the low power dissipation and digital output are very important to be taken into account. Sigmadelta (AEÁ) interface is attractive for MEMS accelerometer since it is simple, provides a digital output, and has a large bandwidth [2]. Many capacitive accelerometer interfaces using direct AEÁ modulator structure have been published [3,4,5], however as the large mechanical and parasitic capacitors must be charged and discharged on the rhythm of the high oversampling clock of the modulator, leading to high power consumption.…”

Section: Introductionmentioning

confidence: 99%

A low power consumption inverter-based ΣΔ interface for capacitive accelerometer

Liu¹,

Xiao²,

2018

IEICE Electron. Express

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A low power dissipation sigma-delta (ΣΔ) interface for closedloop capacitive accelerometer is presented. In order to reduce the power consumption, the front-end circuit blocks work on a much lower frequency than the electronic ΣΔ modulator, and a cascode inverter with dynamic bias is used as an operational amplifier in electronic ΣΔ modulator, reducing the power dissipation greatly and enhancing the immunity to PVT variations. The measured results indicate that, the total power dissipation is 2.2 mW from a 3.3 V power supply. The noise floor of the accelerometer is 7.2 µg/Hz 1/2 in a closed-loop operation, and the achieved figure of merit (FOM, 8 pW/Hz) is better than the previously reported works.

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A Micropower $\Delta\Sigma$-Based Interface ASIC for a Capacitive 3-Axis Micro-Accelerometer

Cited by 58 publications

References 19 publications

Design analysis of a high-Q micromechanical capacitive accelerometer system

Design analysis of a high-Q micromechanical capacitive accelerometer system

A High-Performance Digital Interface Circuit for a High-Q Micro-Electromechanical System Accelerometer

A low power consumption inverter-based ΣΔ interface for capacitive accelerometer

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