Design analysis of a high-Q micromechanical capacitive accelerometer system

Chen, Shaodong; Xu, Haibo

doi:10.1587/elex.14.20170410

Cited by 3 publications

(2 citation statements)

References 11 publications

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“…There are numerous types of accelerometers, including capacitive, piezoelectric, tunnel-current, thermal, and optical [77]. These accelerometers' performance is highly dependent on the fabrication of the displacement sensors, resulting in direct technical limitations in bandwidth, quality factor, and noise [78]. Conventional mechanical accelerometers have wide bandwidths that are suitable for navigation applications, but they suffer from bias and scale factor drift over time [79].…”

Section: ) Quantum Kinematics Empirical Resultsmentioning

confidence: 99%

Exploring Quantum Sensing Potential for Systems Applications

et al. 2023

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The current rise of quantum technology is compelled by quantum sensing research. Thousands of research labs are developing and testing a broad range of sensor prototypes. However, there is a lack of knowledge about specific applications and real-world use cases where the benefits of these sensors will be most pronounced. This study presents a comprehensive review of quantum sensing state-of-practice. It also provides a detailed analysis of how quantum sensing overcomes the existing limitations of sensordriven systems' precision and performance. Based on the review of over 500 quantum sensor prototype reports, we determined four groups of quantum sensors and discussed their readiness for commercial usage. We concluded that quantum magnetometry and quantum optics are the most advanced sensing technologies with empirically proven results. In turn, quantum timing and kinetics are still in the early stages of practical validation. In addition, we defined four systems domains in which quantum sensors offer a solution for existing limitations of conventional sensing technologies. These domains are 1) GPS-free positioning and navigating services, 2) time-based operations, 3) topological visibility, and 4) environment detection, prediction, and modeling. Finally, we discussed the current constraints of quantum sensing technologies and offered directions for future research.

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Section: ) Quantum Kinematics Empirical Resultsmentioning

confidence: 99%

Exploring Quantum Sensing Potential for Systems Applications

et al. 2023

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“…Another high-order Σ∆ loop system realizes low power consumption, low circuit complexity and digital output. But high order system lead to instability and coupling problem between mechanical and circuit [6]. This work will present a system which effectively reduces these unfavorable factors mentioned above.…”

Section: Introductionmentioning

confidence: 99%

Modeling and Analysis of a Closed-Loop System for High-Q MEMS Accelerometer Sensor

Wang

Yang

2018

MATEC Web Conf.

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High-Q sensing element is desirable for high performance while makes the loop control a great challenge. This paper presents a closed-loop system for high-Q capacitive MEMS accelerometer which has achieved loop control effectively. The proportional-derivative(PD)control is developed in the system to improve the system stability. In addition, pulse width modulation (PWM) electrostatic force feedback is designed in the loop to overcome the nonlinearity. Furthermore, a sigma-delta (ΣΔ) modulator with noise shaping is built to realize digital output. System model is built in Matlab/Simulink. The simulation results indicate that equivalent Q value is reduced to 1.5 to ensure stability and responsiveness of the system. The effective number of bits of system output is 14.7 bits. The system nonlinearity is less than 5‰. The equivalent linear model including main noise factors is built, and then a complete theory of noise and linearity analysis is established to contribute to common MEMS accelerometer research.

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Memory-assisted quantum accelerometer with multi-bandwidth

Chen

Fang

et al. 2022

Photon. Res.

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The accelerometer plays a crucial role in inertial navigation. The performance of conventional accelerometers such as lasers is usually limited by the sensing elements and shot noise limitation (SNL). Here, we propose an advanced development of an accelerometer based on atom–light quantum correlation, which is composed of a cold atomic ensemble, light beams, and an atomic vapor cell. The cold atomic ensemble, prepared in a magneto-optical trap and free-falling in a vacuum chamber, interacts with light beams to generate atom–light quantum correlation. The atomic vapor cell is used as both a memory element storing the correlated photons emitted from cold atoms and a bandwidth controller through the control of free evolution time. Instead of using a conventional sensing element, the proposed accelerometer employs interference between quantum-correlated atoms and light to measure acceleration. Sensitivity below SNL can be achieved due to atom–light quantum correlation, even in the presence of optical loss and atomic decoherence. Sensitivity can be achieved at the ng / Hz level, based on evaluation via practical experimental conditions. The present design has a number of significant advantages over conventional accelerometers such as SNL-broken sensitivity, broad bandwidth from a few hundred Hz to near MHz, and avoidance of the technical restrictions of conventional sensing elements.

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Design analysis of a high-Q micromechanical capacitive accelerometer system

Cited by 3 publications

References 11 publications

Exploring Quantum Sensing Potential for Systems Applications

Exploring Quantum Sensing Potential for Systems Applications

Modeling and Analysis of a Closed-Loop System for High-Q MEMS Accelerometer Sensor

Memory-assisted quantum accelerometer with multi-bandwidth

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