A Microminiature Solid-State Capacitive Blood Pressure Transducer with Improved Sensitivity

Frobenius, W.D.; Sanderson, A.; Nathanson, H.C.

doi:10.1109/tbme.1973.324204

Cited by 26 publications

(10 citation statements)

References 3 publications

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“…This gave a 14% change in capacitance, which is very high relative to the 0.6% change in resistivity for a similarly scaled piezoresistive transducer. This order of magnitude greater sensitivity of capacitive transducers is due to greater relative shifts in diaphragm displacement than in diaphragm strain [27,[57][58][59][60]. Additionally, hermetic sealing of the reference chamber by anodic boding eliminated the functional need for bulky reference pressure port, such as a catheter.…”

Section: Mature Bulk Micromachiningmentioning

confidence: 99%

Evolution of micromachined pressure transducers for cardiovascular applications

Starr

Bartels

Agrawal

et al. 2015

Sensors and Actuators A: Physical

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Section: Mature Bulk Micromachiningmentioning

confidence: 99%

Evolution of micromachined pressure transducers for cardiovascular applications

Starr

Bartels

Agrawal

et al. 2015

Sensors and Actuators A: Physical

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“…The earliest applications that leveraged the integration of released microstructures and integrated electronics were pressure sensors fabricated using a MEMS-first approach [79]. In this strategy most of the MEMS-specific fabrication steps were performed prior to the electronics fabrication steps with the exception of the final device release steps.…”

Section: Mems-first Processesmentioning

confidence: 99%

Single‐Chip Scanning Probe Microscopes

Sarkar

Mansour²

2015

Micro‐ and Nanomanipulation Tools

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Scanning probe microscopes (SPMs) are the highest resolution imaging instruments available today and are among the most important tools in nanoscience. Conventional SPMs suffer from several drawbacks owing to their large and bulky construction and to the use of piezoelectric materials. Large scanners have low resonant frequencies that limit their achievable imaging bandwidth and render them susceptible to disturbance from ambient vibrations. Array approaches have been used to alleviate the bandwidth bottleneck; however as arrays are scaled upwards, the scanning speed must decline to accommodate larger payloads. In addition, the long mechanical path from the tip to the sample contributes thermal drift. Furthermore, intrinsic properties of piezoelectric materials result in creep and hysteresis, which contribute to image distortion. The tip-sample interaction signals are often measured with optical configurations that require large free-space paths, are cumbersome to align, and add to the high cost of state-of-the-art SPM systems. These shortcomings have stifled the widespread adoption of SPMs by the nanometrology community. Tiny, inexpensive, fast, stable and independent SPMs that do not incur bandwidth penalties upon array scaling would therefore be most welcome. A method to increase the quality factor (Q-factor) of flexural resonators is introduced. The method relies on an internal energy pumping mechanism that is based on the interplay between electrical, iv mechanical, and thermal effects. To the best of the author's knowledge, the devices that are designed to harness these effects possess the highest electromechanical Qs reported for flexural resonators operating in air; electrically measured Q is enhanced from ~50 to ~50,000 in one exemplary device. A physical explanation for the underlying mechanism is proposed.The design, fabrication, imaging, and tip-based lithographic patterning with the first single-chip Scanning Thermal Microscopes (SThMs) are also presented. In addition to 3 DOF scanning, these devices possess integrated, thermally isolated temperature sensors to detect heat transfer in the tip-sample region.Imaging is reported with thermocouple-based devices and patterning is reported with resistive heater/sensors. An "isothermal electrothermal scanner" is designed and fabricated, and a method to operate it is detailed. The mechanism, based on electrothermal actuation, maintains a constant temperature in a central location while positioning a payload over a range of >35μm, thereby suppressing the deleterious thermal crosstalk effects that have thus far plagued thermally actuated devices with integrated sensors.

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“…While signal conditioning methods has always relayed on analog or mixed-signals electronics, the capacitive senor design, due to the needs of miniaturization, power consumption and costs issues, has shifted from being realized by bulk mechanical parts to microfabricated silicon dies. An early example of this device was fabricated for medical purposes by Frobenius et al [8] in 1973. In 1986 Ko [9] compares the capacitive pressure sensor with the well established piezoresistive device.…”

Section: Capacitive Pressure Sensors In Silicon Technologymentioning

confidence: 99%

Novel Designs for Application Specific MEMS Pressure Sensors

Fragiacomo

Reck

Lorenzen

et al. 2010

Sensors

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In the framework of developing innovative microfabricated pressure sensors, we present here three designs based on different readout principles, each one tailored for a specific application. A touch mode capacitive pressure sensor with high sensitivity (14 pF/bar), low temperature dependence and high capacitive output signal (more than 100 pF) is depicted. An optical pressure sensor intrinsically immune to electromagnetic interference, with large pressure range (0–350 bar) and a sensitivity of 1 pm/bar is presented. Finally, a resonating wireless pressure sensor power source free with a sensitivity of 650 KHz/mmHg is described. These sensors will be related with their applications in harsh environment, distributed systems and medical environment, respectively. For many aspects, commercially available sensors, which in vast majority are piezoresistive, are not suited for the applications proposed.

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A Microminiature Solid-State Capacitive Blood Pressure Transducer with Improved Sensitivity

Cited by 26 publications

References 3 publications

Evolution of micromachined pressure transducers for cardiovascular applications

Evolution of micromachined pressure transducers for cardiovascular applications

Single‐Chip Scanning Probe Microscopes

Novel Designs for Application Specific MEMS Pressure Sensors

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