A micromachined thermoelectric sensor for natural gas analysis: Thermal model and experimental results

Udina, S.; Carmona, M.; Carles, Guillem; Santander, J.; Fonseca, L.; Marco, S.

doi:10.1016/j.snb.2008.05.043

Cited by 38 publications

(27 citation statements)

References 21 publications

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“…The model takes into account the temperature dependence of the thermal properties of the gas mixture and the polysilicon beam. The effective thermal conductivity of the gas mixture, known to be a nonlinear function of different parameters (thermal conductivity, viscosity, molar mass of each gas), was calculated using the Wassiljewa formula and then implemented in the software [14,15].…”

Section: Resultsmentioning

confidence: 99%

A Sensitive Resonant Gas Sensor Based on Multimode Excitation of a Buckled Beam

Hajjaj

Jaber

Alcheikh

et al. 2019

Volume 4: 24th Design for Manufacturing and the Life Cycle Conference; 13th International Conference on Micro- And Nanosystems

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The quest for ultra-sensitive low-cost miniaturized gas sensors in the past few decades has sparked interest to seek alternative approaches other than the conventional gas sensors that need large surface areas and special chemicals for functionalization. MEMS thermal conductivity based gas sensors [1, 2] have been shown to be among the promising candidates since they do not rely on gas absorption or chemical reactions. These sensors show long lifetime and great stability compared to conventional gas sensor. The thermal conductivity based gas sensors rely on the resistance variation of the heated structures due to gas exposure [1]. Typical values of resistance changes are less than few percent. Here, we present a thermal conductivity based gas sensor relying on frequency shifts of an electrothermally heated bridge operated near the buckling point, which leads to ultra-high sensitivity.

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Section: Resultsmentioning

confidence: 99%

A Sensitive Resonant Gas Sensor Based on Multimode Excitation of a Buckled Beam

Hajjaj

Jaber

Alcheikh

et al. 2019

Volume 4: 24th Design for Manufacturing and the Life Cycle Conference; 13th International Conference on Micro- And Nanosystems

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“…The effective thermal conductivity of the gas mixture (keff), known to be a nonlinear function of different parameters (thermal conductivity, viscosity, molar mass of each gas), is calculated using the Wassiljewa formula, as shown in Eq. 1, and then implemented in the software [33,34]…”

Section: Finite Element Simulationsmentioning

confidence: 99%

“…6a shows a comparison between the experimental data and the simulated data for the Methane case. The small deviation among both simulated and experimental results could be explained by the approximate model since we are referring to the Wassiljewa formula [33,34] to calculate the effective thermal conductivity of the gas mixture at each gas concentration. The proposed finite element model can be employed to optimize the sensor design to get higher frequency variation for lower gas concentration.…”

Section: Principle Of Operationmentioning

confidence: 99%

A Resonant Gas Sensor Based on Multimode Excitation of a Buckled Microbeam

et al. 2020

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We report a new gas sensing technique based on the simultaneous tracking of multiple modes of vibration of an electrothermally heated bridge resonator operated near the buckling point. The proposed technique maximizes the sensitivity of the sensor to changes in gases concentrations. We demonstrate a 200% frequency shift in contrast to 0.5% resistance change using the conventional resistive technique. The method also demonstrates selective identification for some gases without the need for surface functionalization of the microstructure. The proposed method is simple in principle and design and is promising for achieving practical low-cost gas sensors.

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“…The first indirect Seebeck sensor based on this type was proposed by McAlleer et al using tin oxide in combination with Pt/Pd catalysts [3]. Another example of indirect Seebeck gas sensors is based on the measurement of the thermal conductivity of gases to analyze gas composition with micromachined thermoelectric sensors [4].…”

Section: Introductionmentioning

confidence: 99%

Seebeck ozone sensors

Mischo

Bitterling

Himmerlich

et al. 2013

2013 Transducers &Amp; Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems

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A direct Seebeck ozone gas sensor is presented based on thin nanocrystalline InOx films. In this type of sensors, the Seebeck voltage is directly altered by chemisorbed gas. InO(x) films with intrinsic electron accumulation at the grain boundaries and surfaces enable the design of sensors at low temperatures. Additionally, ultraviolet illumination can be used to improve the response time. A packaged sensor system was realized, which is able to detect ozone concentrations as low as 10 ppb and is, thus, suitable for environmental monitoring

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A micromachined thermoelectric sensor for natural gas analysis: Thermal model and experimental results

Cited by 38 publications

References 21 publications

A Sensitive Resonant Gas Sensor Based on Multimode Excitation of a Buckled Beam

A Sensitive Resonant Gas Sensor Based on Multimode Excitation of a Buckled Beam

A Resonant Gas Sensor Based on Multimode Excitation of a Buckled Microbeam

Seebeck ozone sensors

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