A micromachined pressure sensor for biomedical applications

Bistue, G.; Elizalde, J.; Garcı́a-Alonso, Ignacio; Olaizola, Santiago M.; Castaño, E.; Gracia, F.J.; Garcia-Alonso, A.

doi:10.1088/0960-1317/7/3/044

Cited by 16 publications

(12 citation statements)

References 9 publications

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“…The number of biomedical applications for Bio‐MEMS is increasing significantly. These include catheter‐based blood pressure sensors,2 thermal conductivity sensors,3 microfluidic devices, and tools for neurosurgery 4. All of these applications represent short‐term use.…”

Section: Introductionmentioning

confidence: 99%

Biocompatibility of atomic layer‐deposited alumina thin films

Finch

Oreskovic

Ramadurai

et al. 2007

J Biomedical Materials Res

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Presented in this paper is a study of the biocompatibility of an atomic layer-deposited (ALD) alumina (Al 2 O 3 ) thin film and an ALD hydrophobic coating on standard glass cover slips. The pure ALD alumina coating exhibited a water contact angle of 558 6 58 attributed, in part, to a high concentration of À ÀOH groups on the surface. In contrast, the hydrophobic coating (tridecafluoro-1,1,2,2-tetrahydro-octyl-methyl-bis(dimethylamino)silane) had a water contact angle of 1088 6 28. Observations using differential interference contrast microscopy on human coronary artery smooth muscle cells showed normal cell proliferation on both the ALD alumina and hydrophobic coatings when compared to cells grown on control substrates. These observations suggested good biocompatibility over a period of 7 days in vitro. Using a colorimetric assay technique to assess cell viability, the cellular response between the three substrates can be differentiated to show that the ALD alumina coating is more biocompatible and that the hydrophobic coating is less biocompatible when compared to the control. These results suggest that patterning a substrate with hydrophilic and hydrophobic groups can control cell growth. This patterning can further enhance the known advantages of ALD alumina, such as conformality and excellent dielectric properties for biomicro electro mechanical systems (Bio-MEMS) in sensors, actuators, and microfluidics devices.

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Section: Introductionmentioning

confidence: 99%

Biocompatibility of atomic layer‐deposited alumina thin films

Finch

Oreskovic

Ramadurai

et al. 2007

J Biomedical Materials Res

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“…Catheter tip-based pressure sensors are currently being manufactured and marketed for in vivo diagnosis of cardiovascular problems. 9,10 In applications like these as well as in most in vitro applications the issue of hemocompatibility of the MEMS materials is circumvented because the device's microfabricated mechanical structure (e.g., pressure sensing diaphragm, 10 flow channel, 8 or valve 6 ) is not in direct contact with blood. The relative thrombogenicity of the materials used in MEMS have therefore not been extensively documented.…”

Section: Introductionmentioning

confidence: 99%

Hemocompatibility of materials used in microelectromechanical systems: Platelet adhesion and morphology in vitro

Weisenberg

Mooradian

2002

J. Biomed. Mater. Res.

123

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Microelectromechanical systems (MEMS) create an opportunity for the development of smaller, cheaper, and more precise biomedical instrumentation and devices. Little is known, however, about the hemocompatibility of the materials used to fabricate these devices. Because of the potentially harmful consequences of thrombus formation, a better understanding of blood interactions with bioMEMS materials is desirable. This study is an in vitro assessment of the hemocompatibility of silicon (Si), silicon dioxide (SiO2), silicon nitride (Si3N4), low-stress silicon nitride (Si(1.0)N(1.1)), SU-8 photoresist, and parylene thin films. A polycarbonate-based polyurethane, was used as a reference material. Experiments were carried out to detect differences in platelet adhesion or morphology after contact with these materials under static conditions. Platelet adhesion on Si, Si3N4, Si(1.0)N(1.1,) and SU-8 photoresist was significantly greater (P < 0.05) than platelet adhesion on polyurethane. Adhesion on parylene and SiO(2) was not significantly different from on polyurethane (P < 0.05). The median platelet area and circularity were higher on polyurethane than all other materials. Materials that showed higher levels of platelet adhesion tended to have platelets that showed less spreading, except for SiO2, where platelets exhibited relatively low adhesion and spreading. This data suggests that Si, Si3N4, Si(1.0)N(1.1), and SU-8 photoresist may be more reactive to platelets and therefore more thrombogenic than parylene, SiO2, and polyurethane. These results may be helpful in guiding the selection of materials for use in the development of blood-contacting microelectromechanical systems.

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“…[7]. Intra-arterial blood pressure (IABP) measurement in intensive care units offer continuous beat-to-beat blood pressure measurement of patients using a pressure sensor placed in a fluid filled cannula inserted directly into the main artery [8][9]. The arterial blood pressure transmitted via fluid deflects the diaphragm of pressure sensor.…”

Section: Introductionmentioning

confidence: 99%

Design and simulation of a novel dual current mirror based CMOS‐MEMS integrated pressure sensor

Kumar

Ropmay

Rathore

et al. 2021

IET Science Measure & Tech

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This paper presents a novel dual current mirror based CMOS circuit for design and development of highly sensitive CMOS-MEMS integrated pressure sensors. The proposed pressure sensing structure has been designed using piezoresistive effect in MOSFETs and 5 μm standard CMOS technology parameters. The proposed structure includes six p-and nchannel MOSFETs and two square silicon diaphragms. MOSFETs MP1 and MN1 are the reference transistors and are placed on the substrate. The pressure sensing MOSFETs MP2 and MP3 are integrated at the mid of fixed edge and at the centre of the diaphragm-1 to sense the maximum tensile and compressive stress developed due to applied pressure. Similarly, the pressure sensing MOSFETs MN2 and MN3 are embedded at the mid of fixed edge and at the centre of the diaphragm-2. COMSOL Multiphysics and LTspice softwares are used for the design and simulation of proposed sensor. The sensitivity of proposed sensor is found to be approximately 7.7 mV/kPa for an input pressure ranging from 0-200 kPa. The output voltage of the sensor has a temperature sensitivity of approximately −0.2 mV/ • C for an operating temperature ranging from −50 to 100 • C at 200 kPa. This CMOS circuit may be an alternative to traditional Wheatstone bridge circuits in future.

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A micromachined pressure sensor for biomedical applications

Cited by 16 publications

References 9 publications

Biocompatibility of atomic layer‐deposited alumina thin films

Biocompatibility of atomic layer‐deposited alumina thin films

Hemocompatibility of materials used in microelectromechanical systems: Platelet adhesion and morphology in vitro

Design and simulation of a novel dual current mirror based CMOS‐MEMS integrated pressure sensor

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