A micro-resonator based magnetometer

Lévy, R.; Perrier, Thomas; Kayser, P.; Bourgeteau, Béatrice; Moulin, Johan

doi:10.1007/s00542-015-2790-2

Cited by 6 publications

(11 citation statements)

References 14 publications

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“…This will be useful in a second time to optimize the resolution of the vibrating beam magnetometer. Indeed, constrains in the ferromagnetic film generate viscoelastic losses which decrease the quality factor [5]. Thus, an optimization of the position of the film is necessary to maximize the quality factor of the resonator without too much reducing the sensitivity of the sensor.…”

Section: Discussionmentioning

confidence: 99%

“…It is interesting to note that the sensitivity is almost identical for all modes used. As ultimate resolution needs the lowest natural frequency [5], the best mode for use as magnetometer is the fundamental.…”

Section: A Solution Without Magnetic Fieldmentioning

confidence: 99%

“…4). Remanent magnetization of NiCo film is about 1e6 A/m [5]. Microscopic observations show the thin film forms a conformal coating on top and lateral faces of the beam, consequently this additional ferromagnetic material must be considered in the sensitivity calculations.…”

Section: B Experimental Validationsmentioning

confidence: 99%

“…However, to be efficient in the most demanding applications, their resolution needs to be improved. For this purpose, vibrating beam magnetometers with ferromagnetic thin layer sputtered on the resonator seem to be a promising way [4], [5].…”

Section: Introductionmentioning

confidence: 99%

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Modeling of a vibrating MEMS magnetometer partially covered with a ferromagnetic thin film

Perrier

Lévy

Kayser

et al. 2018

2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)

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This paper describes a fully analytic model of sensitivity of a vibrating magnetometer partially covered with a ferromagnetic thin film. This model is based on the Rayleigh's energetic method and is confirmed by Finite Element Method (FEM) and experimental measurements. Thereby, it is possible to optimize the position of the ferromagnetic thin film and find the best tradeoff between the sensitivity increase and the reduction of resonator energy losses to achieve better resolution.

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Section: Discussionmentioning

confidence: 99%

Section: A Solution Without Magnetic Fieldmentioning

confidence: 99%

Section: B Experimental Validationsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Modeling of a vibrating MEMS magnetometer partially covered with a ferromagnetic thin film

Perrier

Lévy

Kayser

et al. 2018

2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)

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“…Magnetic field value can be deduced through the measure of this frequency shift. Indeed, this frequency shift depends linearly on the value of the magnetic field applied [16].…”

Section: Introduction Ecent Development Of High Resolution Magnetomentioning

confidence: 99%

Optimization of an MEMS Magnetic Thin Film Vibrating Magnetometer

et al. 2017

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This paper presents models developed through analytical or numerical computation and finite element analysis to improve the resolution of a new kind of vibrating magnetometers. This peculiar magnetometer uses the piezoelectric transduction to actuate a quartz resonator at its resonance frequency taking advantage of the high Q factor of a quartz resonator to achieve high resolution. The magnetic sensitive element is a thin ferromagnetic film of Nickel-Cobalt which is sputtered on the moving beams of the resonator. This magnetic thin film applies a periodic torque on the resonator, shifting its resonance frequency. This torque depends on the magnetic field applied; therefore the value of the magnetic field can be deduced from the frequency shift measurement. The aim of this paper is to develop and improve sensitivity models which will be useful tools in a future work to establish the optimal geometry for a resonator and the best position of the magnetic thin film on it in order to improve the sensitivity and resolution of the global sensor.

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