A Micro-Oven-Controlled Dual-Mode Piezoelectric MEMS Resonator With ±400 PPB Stability Over −40 to 80 °C Temperature Range

Jia, Wenhan; Chen, Wen; Xiao, Yuhao; Wu, Zhongye; Wu, Guoqiang

doi:10.1109/ted.2022.3159287

Cited by 9 publications

(4 citation statements)

References 28 publications

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“…The proposed resonators achieved 1-week frequency stability close to 1.5 ppb by doping and active control. A dual-mode piezoelectric OCMO was proposed by [130], and it achieved a frequency stability of less than ± 400 ppb in the range of − 40 • C to 80 • C. Similarly, the ovenized dual-mode resonators based on highly doped single-crystal silicon were proposed in 2016 and 2019, and achieving ± 250 ppb [131] and ± 1.5 ppb [132] frequency offset over the 100 • C temperature range, respectively. A dual frequency resonator with an output frequency of 1.27 MHz or 13 MHz fabricated at 0 DEG and 45 DEG, respectively, was demonstrated by Ref.…”

Section: Active Compensationmentioning

confidence: 99%

Concepts and Key Technologies of Microelectromechanical Systems Resonators

Feng

Yuan

et al. 2022

Micromachines

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In this paper, the basic concepts of the equivalent model, vibration modes, and conduction mechanisms of MEMS resonators are described. By reviewing the existing representative results, the performance parameters and key technologies, such as quality factor, frequency accuracy, and temperature stability of MEMS resonators, are summarized. Finally, the development status, existing challenges and future trend of MEMS resonators are summarized. As a typical research field of vibration engineering, MEMS resonators have shown great potential to replace quartz resonators in timing, frequency, and resonant sensor applications. However, because of the limitations of practical applications, there are still many aspects of the MEMS resonators that could be improved. This paper aims to provide scientific and technical support for the improvement of MEMS resonators in timing, frequency, and resonant sensor applications.

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Section: Active Compensationmentioning

confidence: 99%

Concepts and Key Technologies of Microelectromechanical Systems Resonators

Feng

Yuan

et al. 2022

Micromachines

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“…Temperature stability is critical for microelectromechanical systems (MEMS) device applications such as inertial sensing and frequency reference [ 1 ]. Silicon-based piezoelectric resonators are some of the most reported and used MEMS devices, and they have shown great potential to replace traditional quartz resonators in recent years [ 2 ]. However, MEMS resonators’ −30 ppm/°C temperature coefficient (TCF) hinders their further development [ 3 ].…”

Section: Introductionmentioning

confidence: 99%

“…The above method only improves the material properties and does not overcome the temperature change. Studies have shown that oven-controlled methods achieve the highest frequency stability over the entire industrial temperature range [ 2 , 3 , 8 , 11 , 12 , 13 ]. For example, Xu designed a piezoelectric MEMS resonator with an integrated heater and achieved a stability of 100 ppm from −35 °C to 85 °C [ 14 ].…”

Section: Introductionmentioning

confidence: 99%

“…In 2022, Jia proposed to simultaneously excite two modes on a resonator and use the frequency shift of one of the modes as a temperature detection method. Low power consumption was achieved with the help of folded beams and an isolation frame, and a stability of ±0.4 ppm was achieved over the temperature range of −40 °C to 80 °C [ 2 ]. The above work proved that oven control technology is an effective method to improve the stability of MEMS devices by maintaining a constant temperature in real time [ 16 ].…”

Section: Introductionmentioning

confidence: 99%

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A Micro-Hotplate-Based Oven-Controlled System Used to Improve the Frequency Stability of MEMS Resonators

Feng

et al. 2023

Micromachines

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This paper introduces a chip-level oven-controlled system for improving the temperature stability of MEMS resonators wherein we designed the resonator and the micro-hotplate using MEMS technology, then bounding them in a package shell at the chip level. The resonator is transduced by AlN film, and its temperature is monitored by temperature-sensing resistors on both sides. The designed micro-hotplate is placed at the bottom of the resonator chip as a heater and insulated by airgel. The PID pulse width modulation (PWM) circuit controls the heater according to the temperature detection result to provide a constant temperature for the resonator. The proposed oven-controlled MEMS resonator (OCMR) exhibits a frequency drift of 3.5 ppm. Compared with the previously reported similar methods, first, the OCMR structure using airgel combined with a micro-hotplate is proposed for the first time, and the working temperature is extended from 85 °C to 125 °C. Second, our work does not require redesign or additional constraints on the MEMS resonator, so the proposed structure is more general and can be practically applied to other MEMS devices that require temperature control.

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