1993
DOI: 10.1088/0960-1317/3/3/006
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A micro electro mechanical CAD extension for SESES

Abstract: The current state of-and future plans for-the microelectro mechanical CAD system SESES developed at the ETH Zurich are presented. The algorithmic requirements for the numerical modelling of microelectromechanical (MEM) devices are presented with reference to six important modelling problems. Numerical results are given for an electrostatic comb actuator.

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Cited by 10 publications
(6 citation statements)
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“…Here, RM is our notation for the elastostatic equilibrium equations, note that it indicates the dependence on electrostatic forces. The most obvious approach to solving the coupled system of (6) and (7) is to use a simple relaxation scheme [4], [5], [11], as diagrammed in Figure 1. The relaxation algorithm does not always converge, however, particularly when the electrostatic forces are large and the structure is extremely compliant [12].…”
Section: Coupled Methodsmentioning
confidence: 99%
“…Here, RM is our notation for the elastostatic equilibrium equations, note that it indicates the dependence on electrostatic forces. The most obvious approach to solving the coupled system of (6) and (7) is to use a simple relaxation scheme [4], [5], [11], as diagrammed in Figure 1. The relaxation algorithm does not always converge, however, particularly when the electrostatic forces are large and the structure is extremely compliant [12].…”
Section: Coupled Methodsmentioning
confidence: 99%
“…This states the coupled nonlinear semi-discrete system. In order to integrate Equations (24) and (25) in time, we will examine both an implicit method (mid-point rule) and an explicit method (centered-difference scheme). For the dynamical implicit solution, we employ the mid-point rule.…”
Section: Algorithmic Solution Of the Coupled Systemmentioning
confidence: 99%
“…Many formulations exist in the literature to handle electro‐mechanical coupling. We mention in particular the coupled finite‐element/boundary‐element methods (FEBE) , and Lagrangian or arbitrary Lagrangian–Eulerian methods (ALE) . For both FEBE and ALE approaches, one faces challenges when the topology of the electrical field domain changes because of contacting bodies.…”
Section: Introductionmentioning
confidence: 99%
“…The most obvious approach to solving the coupled system of (6) and 7is to use a simple relaxation scheme [4], [5], [11], as diagrammed in Figure 1. The relaxation algorithm does not always converge, however, particularly when the electrostatic forces are large and the structure is extremely compliant [12].…”
Section: R U Qmentioning
confidence: 99%