A method to evaluate the influence of different substrate on stress mismatch induced deformation in MEMS accelerometer

You, Jun; Tian, Donghai; He, Chunhua; Zhao, Qiancheng; Yang, Zhiqing; Zhang, Dacheng; Yan, Guizhen

doi:10.1109/nems.2015.7147458

10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems 2015

DOI: 10.1109/nems.2015.7147458

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A method to evaluate the influence of different substrate on stress mismatch induced deformation in MEMS accelerometer

Jun You

Donghai Tian

Chunhua He

et al.

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A method to evaluate the influence of different substrate on stress mismatch induced deformation in MEMS accelerometer

Cited by 1 publication

References 0 publications

Simulation Analysis on Thermal Drift of MEMS Sandwich Accelerometer

Simulation Analysis on Thermal Drift of MEMS Sandwich Accelerometer

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