“…In addition, re-thinning is always possible after manipulation to the slotted grid as described in the next section. These are important features realized in previous reports (Langford & Petford-Long, 2001; Rossie et al, 2001; Patterson et al, 2002; Lee & Lee, 2005; Lue et al, 2007). Figure 8 Use of the EXpressLO™ grid for electron transparent specimens ( a ) manipulation of an electron transparent specimen directly to the slotted grid and ( b ) corresponding transmission electron microscope image.…”
Section: Resultssupporting
confidence: 69%
“…In addition, re-thinning is always possible after manipulation to the slotted grid as described in the next section. These are important features realized in previous reports (Langford & Petford-Long, 2001;Rossie et al, 2001;Patterson et al, 2002;Lee & Lee, 2005;Lue et al, 2007).…”
Section: Exlo To a New Expresslo™ Slotted Gridsupporting
confidence: 69%
“…This specimen was lifted out and manipulated to the grid in~2.5 min. These are important features realized in previous reports (Langford & Petford-Long, 2001;Rossie et al, 2001;Patterson et al, 2002;Lee & Lee, 2005;Lue et al, 2007). Conversely, for conventional EXLO, it is best to have the specimen positioned underneath or hanging from the side of the probe so that it can be positioned or dropped onto the film.…”
Section: Exlo To a New Expresslo™ Slotted Gridmentioning
confidence: 92%
“…This required the use of an adhesive to attach the specimen to the square mesh support bars of the grid. A grid sliced in half and then FIB processed to accept specimens has also been used to support EXLO manipulated samples (Lue et al, 2007). In another example, INLO of an EXLO specimen was performed and then further thinned (Lee & Lee, 2005).…”
Section: Design Of a New Specimen Support Gridmentioning
confidence: 99%
“…Once again, the adhesion forces were strong enough to hold the specimen in place during ion milling and TEM analysis. A grid sliced in half and then FIB processed to accept specimens has also been used to support EXLO manipulated samples (Lue et al, 2007). This technique also enabled subsequent FIB milling and manipulation without a thin support film.…”
Section: Design Of a New Specimen Support Gridmentioning
The ex situ lift out (EXLO) adhesion forces are reviewed and new applications of EXLO for focused ion beam (FIB)-prepared specimens are described. EXLO is used to manipulate electron transparent specimens on microelectromechanical systems carrier devices designed for in situ electron microscope analysis. A new patented grid design without a support film is described for EXLO. This new slotted grid design provides a surface for holding the specimen in place and also allows for post lift out processing. Specimens may be easily manipulated into a backside orientation to reduce FIB curtaining artifacts with this slotted grid. Large EXLO specimens can be manipulated from Xe+ plasma FIB prepared specimens. Finally, applications of EXLO and manipulation of FIB specimens using a vacuum probe lift out method are shown. The vacuum probe provides more control for placing specimens on the new slotted grids and also allows for easy manipulation into a backside configuration.
“…In addition, re-thinning is always possible after manipulation to the slotted grid as described in the next section. These are important features realized in previous reports (Langford & Petford-Long, 2001; Rossie et al, 2001; Patterson et al, 2002; Lee & Lee, 2005; Lue et al, 2007). Figure 8 Use of the EXpressLO™ grid for electron transparent specimens ( a ) manipulation of an electron transparent specimen directly to the slotted grid and ( b ) corresponding transmission electron microscope image.…”
Section: Resultssupporting
confidence: 69%
“…In addition, re-thinning is always possible after manipulation to the slotted grid as described in the next section. These are important features realized in previous reports (Langford & Petford-Long, 2001;Rossie et al, 2001;Patterson et al, 2002;Lee & Lee, 2005;Lue et al, 2007).…”
Section: Exlo To a New Expresslo™ Slotted Gridsupporting
confidence: 69%
“…This specimen was lifted out and manipulated to the grid in~2.5 min. These are important features realized in previous reports (Langford & Petford-Long, 2001;Rossie et al, 2001;Patterson et al, 2002;Lee & Lee, 2005;Lue et al, 2007). Conversely, for conventional EXLO, it is best to have the specimen positioned underneath or hanging from the side of the probe so that it can be positioned or dropped onto the film.…”
Section: Exlo To a New Expresslo™ Slotted Gridmentioning
confidence: 92%
“…This required the use of an adhesive to attach the specimen to the square mesh support bars of the grid. A grid sliced in half and then FIB processed to accept specimens has also been used to support EXLO manipulated samples (Lue et al, 2007). In another example, INLO of an EXLO specimen was performed and then further thinned (Lee & Lee, 2005).…”
Section: Design Of a New Specimen Support Gridmentioning
confidence: 99%
“…Once again, the adhesion forces were strong enough to hold the specimen in place during ion milling and TEM analysis. A grid sliced in half and then FIB processed to accept specimens has also been used to support EXLO manipulated samples (Lue et al, 2007). This technique also enabled subsequent FIB milling and manipulation without a thin support film.…”
Section: Design Of a New Specimen Support Gridmentioning
The ex situ lift out (EXLO) adhesion forces are reviewed and new applications of EXLO for focused ion beam (FIB)-prepared specimens are described. EXLO is used to manipulate electron transparent specimens on microelectromechanical systems carrier devices designed for in situ electron microscope analysis. A new patented grid design without a support film is described for EXLO. This new slotted grid design provides a surface for holding the specimen in place and also allows for post lift out processing. Specimens may be easily manipulated into a backside orientation to reduce FIB curtaining artifacts with this slotted grid. Large EXLO specimens can be manipulated from Xe+ plasma FIB prepared specimens. Finally, applications of EXLO and manipulation of FIB specimens using a vacuum probe lift out method are shown. The vacuum probe provides more control for placing specimens on the new slotted grids and also allows for easy manipulation into a backside configuration.
We have developed the focused ion beam (FIB) fold-out technique, for transmission electron microscopy (TEM) sample preparation in which there is no fine polishing or dimpling, thus saving turnaround time. It does not require a nanomanipulator yet is still site specific. The sample wafer is cut to shape, polished down, and then placed in a FIB system. A tab containing the area of interest is created by ion milling and then "folded out" from the bulk sample. This method also allows a plan-view of the sample by removing material below the wafer's surface film or device near the polished edge. In the final step, the sample is thinned to electron transparency, ready to be analyzed in the TEM. With both a cross section and plan-view, our technique gives microscopists a powerful tool in analyzing multiple zone axes in one TEM session. The nature of the polished sample edge also includes the ability to sample many areas, allowing the user to examine a very large device or sample. More importantly, this technique could make multiple site-specific e-beam transparent specimens in one polished sample, which is difficult to do when prepared by other methods.
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