A membrane type Si-MEMS tactile imager with fingerprint structure for realization of slip sensing capability

Okada, Hiroki; Yawata, M.; Ishida, M.; Sawada, Kazuaki; Takao, Hidekuni

doi:10.1109/memsys.2010.5442333

Cited by 7 publications

(2 citation statements)

References 2 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…SENSING ELEMENTS CMOS-based tactile sensor systems used in various application scenarios most often make use of capacitive or piezoresistive sensing elements. Depending on the required sensitivity and mechanical stiffness of piezoresistive tactile sensors, silicon chips have been locally thinned to membranes [7,13], and flexible beam-based structures [14] using CMOScompatible MEMS processing.…”

Section: Introductionmentioning

confidence: 99%

CMOS tactile sensor systems

et al. 2013

View full text Add to dashboard Cite

Tactile sensor systems based on complementary metal-oxide-semiconductor (CMOS) technologies have found a wide variety of applications covering various types of manmachine interfaces as well as industrial applications. These sensor systems are realized using commercially available CMOS processes combined with appropriate assembly technologies for advanced system packages, and dedicated micromachining processes to realize membranes or beam structures to improve the sensor sensitivity. Piezoresistive CMOS-based tactile sensor systems make use of implanted resistors and field-effect transistors (FETs) exploiting the piezoresistive effect in silicon. The applied CMOS chips extract the mechanical stress distribution in the chip surface which is characteristic for the corresponding mechanical loading of the CMOS chip or its package. This paper describes a three-dimensional force sensor used in metrology to extract the 3D geometry of precision machined parts, and the Smart Tooth, an innovative tool for orthodontic research and education.

show abstract

Section: Introductionmentioning

confidence: 99%

CMOS tactile sensor systems

et al. 2013

View full text Add to dashboard Cite

show abstract

“…Tactile Sensing Chips With POSFET Array and Integrated Interface Electronics many times the sensors are big in size and considering also the associated electronics, they may not be suitable for parts like fingertips of a robot, where large numbers of sensors are needed. For this reason, Micro-Electro-Mechanical Systems (MEMS) based miniaturized touch sensors with on-chip electronics have been explored in past [5], [6]. The MEMS based touch sensors are realized with diaphragms and cantilevers and are generally sensitive [7].…”

mentioning

confidence: 99%

Tactile Sensing Chips With POSFET Array and Integrated Interface Electronics

et al. 2014

View full text Add to dashboard Cite

This paper presents the advanced version of novel piezoelectric oxide semiconductor field effect transistor (POSFET) devices-based tactile sensing chip. The new version of the tactile sensing chip presented here comprises of a 4 × 4 array of POSFET touch sensing devices and integrated interface electronics (i.e., multiplexers, high compliance current sinks, and voltage output buffers). The chip also includes four temperature diodes for the measurement of contact temperature. Various components on the chip have been characterized systematically and the overall operation of the tactile sensing system has been evaluated. With new design, the POSFET devices have improved performance [i.e., linear response in the dynamic contact forces range of 0.01-3 N and sensitivity (without amplification) of 102.4 mV/N], which is more than twice the performance of their previous implementations. The integrated interface electronics result in reduced interconnections which otherwise would be needed to connect the POSFET array with off-chip interface electronic circuitry. This paper paves the way for CMOS implementation of full on-chip tactile sensing systems based on POSFETs.

show abstract

POSFET tactile sensing chips using CMOS technology

et al. 2013

View full text Add to dashboard Cite

This work presents the advanced version of novel\ud POSFET (Piezoelectric Oxide Semiconductor Field Effect\ud Transistor) devices based tactile sensing chip. The tactile sensing\ud chip in the new version, presented here, has been fabricated\ud using CMOS (Complementary Metal Oxide Semiconductor)\ud technology. The chip consists of 4 x 4 POSFET touch sensing\ud devices, four temperature diodes, and the electronic circuitry\ud comprising of multiplexers, current mirrors, high compliance\ud current sinks and voltage output buffers. The on chip POSFET\ud devices have linear response in the tested dynamic contact forces\ud range of 0.01–3N and the sensitivity (without amplification) is\ud 102.4 mV/N

show abstract

A membrane type Si-MEMS tactile imager with fingerprint structure for realization of slip sensing capability

Cited by 7 publications

References 2 publications

CMOS tactile sensor systems

CMOS tactile sensor systems

Tactile Sensing Chips With POSFET Array and Integrated Interface Electronics

POSFET tactile sensing chips using CMOS technology

Contact Info

Product

Resources

About