A mechanism of surface micro-roughening by ion bombardment

Sigmund, Peter

doi:10.1007/bf00754888

Cited by 549 publications

(306 citation statements)

References 13 publications

Supporting

Mentioning

288

Contrasting

Unclassified

Order By: Relevance

“…Since its discovery nearly half a century ago [2], it has been suspected that this ''sputter pattern'' formation is caused by sputter erosion effects. The erosion-based paradigm was established firmly 22 years ago when the destabilizing effect of the surface curvature-dependent [3] sputter yield (atoms removed per incident ion) was incorporated into the linear stability theory of Bradley and Harper [4] (BH). In BH theory the characteristic length scale of the pattern originates from differing wave number dependences of two competing effects: the destabilizing effect of a sputter yield that increases with increasing concave curvature, and the stabilizing effect of capillarity-driven surface diffusion.…”

mentioning

confidence: 99%

Mass Redistribution Causes the Structural Richness of Ion-Irradiated Surfaces

et al. 2011

View full text Add to dashboard Cite

We show that the ''sputter patterning'' topographical instability is determined by the effects of ion impact-induced prompt atomic redistribution and that erosion-the consensus predominant cause-is essentially irrelevant. We use grazing incidence small angle x-ray scattering to measure in situ the damping of noise or its amplification into patterns via the linear dispersion relation. A model based on the effects of impact-induced redistribution of those atoms that are not sputtered away explains both the observed ultrasmoothening at low angles from normal incidence and the instability at higher angles.

show abstract

mentioning

confidence: 99%

Mass Redistribution Causes the Structural Richness of Ion-Irradiated Surfaces

et al. 2011

View full text Add to dashboard Cite

show abstract

“…In the Sigmund model, the mean distance that a surface point recedes as a result of an ion impact is proportional to the the energy density that is deposited there by the collision cascade [17]. We will denote the constant of proportionality by Λ.…”

Section: Analytical Theorymentioning

confidence: 99%

“…Using the Sigmund model of ion sputtering [17], analytical results are obtained in Sect. II for surfaces whose radii of curvature are large compared to the depth of the energy deposition profile, a.…”

Section: Introductionmentioning

confidence: 99%

Sputter yield of curved surfaces

et al. 2015

View full text Add to dashboard Cite

The mean sputter yield produced by the impact of a single ion depends on the radii of curvature of the target surface at the point of impact. Using the Sigmund model of ion sputtering, we develop analytical formulae for this dependence for the case in which the radii of curvature are large compared to the size of the ion-induced collision cascade; both locally perpendicular and oblique ion impact are considered. The sputter yield is increased for impact on convex surfaces. The influence of surface curvature along the incident-ion azimuth and perpendicular to it are discussed separately. Our analytical results are in good agreement with Monte Carlo simulations for the specific case of 20 keV Ar ion impact on a cylindrical nanowire consisting of amorphous silicon. We also extend the results for this case to small radii of curvature using both Monte Carlo and molecular dynamics simulations.

show abstract

“…Pattern formation due to curvaturedependent ion beam erosion can be described by the linear theory of Bradley-Harper (BH) [1] and related theories with non-linear extensions [2][3][4][5][6][7][8]. In the BH model, curvature-dependent sputtering depends linearly on the locally deposited energy approximated by Sigmund's ellipsoidal energy deposition [9]. Other continuum models which were developed to describe pattern formation on surfaces consider plastic flow in a viscoelastic continuum under ion induced stress [10][11][12] or hydrodynamic behaviour of an amorphous surface layer exposed to ion irradiation [13][14][15][16].…”

Section: Introductionmentioning

confidence: 99%

Surface instability and pattern formation by ion-induced erosion and mass redistribution

Hofsäß

2013

Appl. Phys. A

View full text Add to dashboard Cite

The contribution of curvature dependent sputtering and mass redistribution to ion-induced self-organized formation of periodic surface nanopatterns is revisited. Ion incidence angle-dependent curvature coefficients and ripple wavelengths are calculated from 3-dimensional collision cascade data obtained from binary collision Monte Carlo simulations. Significant modifications concerning mass redistribution compared to the model of Carter and Vishnyakov and also models based on crater functions are introduced. Furthermore, I find that curvature-dependent erosion is the dominating contribution to pattern formation, except for very low-energy irradiation of a light matrix with heavy ions. The major modifications regarding mass redistribution and ion-induced viscous flow are related to the ion incidence angle-dependent thickness of the irradiated layer. A smaller modification concerns the relaxation of inward-directed mass redistribution. Ioninduced viscous flow in the surface layer also depends on the layer thickness and is thus strongly angle dependent. Simulation results are presented and compared to a variety of published experimental results. The simulations show that in most cases curvature-dependent erosion is the dominant contribution to surface instability and ripple pattern formation and also determines the pattern orientation transition. The simulations predict the occurrence of perpendicular ripple patterns at larger ion incidence angles, in agreement with experimental observations. Mass redistribution causes stabilization of the surface at near-normal ion incidence angles and dominates pattern formation only at very low ion energies.

show abstract

A mechanism of surface micro-roughening by ion bombardment

Cited by 549 publications

References 13 publications

Mass Redistribution Causes the Structural Richness of Ion-Irradiated Surfaces

Mass Redistribution Causes the Structural Richness of Ion-Irradiated Surfaces

Sputter yield of curved surfaces

Surface instability and pattern formation by ion-induced erosion and mass redistribution

Contact Info

Product

Resources

About