2008
DOI: 10.1088/0268-1242/23/7/075035
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A low-voltage flash memory cell utilizing the gate-injection program/erase method with a recessed channel structure

Abstract: In this paper, a low-voltage recessed channel SONOS flash memory using the gate-injection program/erase method is proposed and investigated for NAND application. It is shown that the proposed flash memory can achieve 8 V lower programming voltage compared with planar flash memory, due to the effective capacitance coupling and the electric-field enhancement by combining the recessed channel structure and the gate-injection program/erase method. In addition, more than 30% larger threshold voltage window and impr… Show more

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Cited by 3 publications
(3 citation statements)
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References 8 publications
(10 reference statements)
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“…Recently, low cost has been an important consideration in nonvolatile memory (NVM) application. In addition, the demands of the embedded nonvolatile memory for system integration on a chip is rapidly increasing, Among the various NVM memory structures [1][2][3][4][5][6], single-poly memory is one of the promising solutions for low-cost-embedded NVM applications [6][7][8][9][10][11][12]. The conventional single-poly EEPROM cells with diffused n-well CG suffer some issues, such as the large CG junction capacitance and resistance, the reduction of the coupling factor (α CG ), and the signal disturbance from n-well CG to the adjacent blocks through the substrate [11,12], as well as the slow erasing speed.…”
Section: Introductionmentioning
confidence: 99%
“…Recently, low cost has been an important consideration in nonvolatile memory (NVM) application. In addition, the demands of the embedded nonvolatile memory for system integration on a chip is rapidly increasing, Among the various NVM memory structures [1][2][3][4][5][6], single-poly memory is one of the promising solutions for low-cost-embedded NVM applications [6][7][8][9][10][11][12]. The conventional single-poly EEPROM cells with diffused n-well CG suffer some issues, such as the large CG junction capacitance and resistance, the reduction of the coupling factor (α CG ), and the signal disturbance from n-well CG to the adjacent blocks through the substrate [11,12], as well as the slow erasing speed.…”
Section: Introductionmentioning
confidence: 99%
“…From the sweep direc-tion of the CV curve it is inferred that gate injection of carriers controls the memory operation. Although conventional flash memory architecture follows channel injection of carriers [20], the interface degrades fast in such devices [34]. Thus, compared to channel injected devices, gate-injected devices show higher endurance which is one of the key requirements of memory operation [35].…”
mentioning
confidence: 99%
“…Thus, compared to channel injected devices, gate-injected devices show higher endurance which is one of the key requirements of memory operation [35]. Because of such advantages, the quest for efficient gateinjected flash memory devices is ongoing [34][35][36][37]. A systematic change in the hysteresis window as a function of heating temperature is presented in Fig.…”
mentioning
confidence: 99%