A Low-Power, Low-Cost Infra-Red Emitter in CMOS Technology

Ali, Syed Zeeshan; Luca, Andrea De; Hopper, Richard; Boual, Sophie; Gardner, Julian W.; Udrea, F.

doi:10.1109/jsen.2015.2464693

Cited by 47 publications

(51 citation statements)

References 20 publications

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“…Figure g shows the output of the ETD detector corresponding to the input square wave voltage with a duty ratio of 50% and low and high voltage levels of 3.3 and 4.3 V, respectively. As we can clearly see, a fast temporal response with a frequency of up to 0.5 MHz and a response time of <1 µs is realized, which is four orders magnitude faster than that of traditional thermionic electron emitters …”

Section: Resultsmentioning

confidence: 86%

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High‐Performance On‐Chip Thermionic Electron Micro‐Emitter Arrays Based on Super‐Aligned Carbon Nanotube Films

Wang

Yang

et al. 2019

Adv Funct Materials

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An important advancement towards the realization of miniaturized and fully integrated vacuum electronic devices will be the development of on‐chip integrated electron sources with stable and reproducible performances. Here, the fabrication of high‐performance on‐chip thermionic electron micro‐emitter arrays is demonstrated by exploiting suspended super‐aligned carbon nanotube films as thermionic filaments. For single micro‐emitter, an electron emission current up to ≈20 µA and density as high as ≈1.33 A cm−2 are obtained at a low‐driven voltage of 3.9 V. The turn‐on/off time of a single micro‐emitter is measured to be less than 1 µs. Particularly, stable (±1.2% emission current fluctuation for 30 min) and reproducible (±0.2% driven voltage variation over 27 cycles) electron emission have been experimentally observed under a low vacuum of ≈5 × 10−4 Pa. Even under a rough vacuum of ≈10−1 Pa, an impressive reproducibility (±2% driven voltage variation over 20 cycles) is obtained. Moreover, emission performances of micro‐emitter arrays are found to exhibit good uniformity. The outstanding stability, reproducibility, and uniformity of the thermionic electron micro‐emitter arrays imply their promising applications as on‐chip integrated electron sources.

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Section: Resultsmentioning

confidence: 86%

“…As we can clearly see, a fast temporal response with a frequency of up to 0.5 MHz and a response time of <1 µs is realized, which is four orders magnitude faster than that of traditional thermionic electron emitters. [34]…”

Section: Thermionic Electron Emission Characteristics Of Single Micromentioning

confidence: 99%

High‐Performance On‐Chip Thermionic Electron Micro‐Emitter Arrays Based on Super‐Aligned Carbon Nanotube Films

Wang

Yang

et al. 2019

Adv Funct Materials

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“…This presents an additional demand for the device, as a short exhale of approximately 3 seconds needs to be recorded and analysed [17]. In terms of affordability, MEMs based IR emitters cannot compete with a simple IR micro bulbs [18] but affordable CMOS based systems (with detectors) are possible but not yet produced for the mainstream market. The state of the art CO2 detection system is yet to be well defined.…”

Section: Ndir Sensorsmentioning

confidence: 99%

A low cost MEMS based NDIR system for the monitoring of carbon dioxide in breath analysis at ppm levels

Vincent

Gardner

2016

Sensors and Actuators B: Chemical

138

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Please cite this article as: T.A.Vincent, J.W.Gardner, A low cost MEMS based NDIR system for the monitoring of carbon dioxide in breath analysis at ppm levels, Sensors and Actuators B: Chemical http://dx.doi.org/10. 1016/j.snb.2016.04.016 This is a PDF file of an unedited manuscript that has been accepted for publication. As a service to our customers we are providing this early version of the manuscript. The manuscript will undergo copyediting, typesetting, and review of the resulting proof before it is published in its final form. Please note that during the production process errors may be discovered which could affect the content, and all legal disclaimers that apply to the journal pertain.A low cost MEMS based NDIR system for the monitoring of carbon dioxide in breath analysis at ppm levels Highlights  MEMS based NDIR system for ppm CO2 detection with lock-in amplifier.  Fast 1.3 s response time for breath-by-breath analysis.  Portable breath analyser designed for measuring metabolic rate of subjects.  Effect of path length on NDIR system investigated with novel sensor housing.  Silicon on insulator IR emitter used for low power, low cost gas detection. AbstractThe molecules in our breath can provide a wealth of information about the health and well-being of a person. The level of carbon dioxide (CO2) is not only a sign of life but also when combined with the level of exhaled oxygen provides valuable health information in the form of our metabolic rate. We report upon the development of a MEMS-based non-dispersive infrared CO2 sensor for inclusion in a hand held portable breath analyser. Our novel sensor system comprises a thermopile detector and low power MEMS silicon on insulator (SOI) wideband infrared (IR) emitter. A lock-in amplifier design permits a CO2 concentration of 50 ppm to be detected on gas bench rig. Different IR path lengths were studied with gases in dry and humid (25 % and 50 % RH) in order to design a sensor suitable for detecting CO2 in breath with concentrations in the range of 4 to 5 %. A breath analyser was constructed from acetal and in part 3D printed with a side-stream sampling mechanism and tested on a range of subjects with two data-sets presented here. The performance of the novel MEMS based sensor was validated using a reference commercial breath-by-breath sensor and produced comparable results and gave a response time of 1.3 s. Further work involves the detection of other compounds on breath for further metabolic analysis and reducing the overall resolution of our MEMS sensor system from ca. 250 ppm to 10 ppm.

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“…However, the fabrication of these devices requires the use of precise epitaxial growth, which can lead to additional costs. A less complicated type of MIR source is the incandescent emitter, such as a conventional tungsten filament and a silicon-based micro-machined membrane [13], which has high radiant power. However, due to the low modulation speed and broadband gray-body emission spectrum, these emitters must typically be used in conjunction with choppers and optical filters to achieve a transient and narrowband emission spectrum for detecting a certain gas or functional group.…”

Section: Introductionmentioning

confidence: 99%

Metamaterial-based graphene thermal emitter

et al. 2017

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A thermal emitter composed of a frequency-selective surface metamaterial layer and a hexagonal boron nitride-encapsulated graphene filament is demonstrated. The broadband thermal emission of the metamaterial (consisting of ring resonators) was tailored into two discrete bands, and the measured reflection and emission spectra agreed well with the simulation results. The high modulation frequencies that can be obtained in these devices, coupled with their operation in air, confirm their feasibility for use in applications such as gas sensing.

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A Low-Power, Low-Cost Infra-Red Emitter in CMOS Technology

Cited by 47 publications

References 20 publications

High‐Performance On‐Chip Thermionic Electron Micro‐Emitter Arrays Based on Super‐Aligned Carbon Nanotube Films

High‐Performance On‐Chip Thermionic Electron Micro‐Emitter Arrays Based on Super‐Aligned Carbon Nanotube Films

A low cost MEMS based NDIR system for the monitoring of carbon dioxide in breath analysis at ppm levels

Metamaterial-based graphene thermal emitter

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