A Low Power Four-Channel Metal Oxide Semiconductor Gas Sensor Array With T-Shaped Structure

Wafer‐Level Manufacturing of MEMS H2 Sensing Chips Based on Pd Nanoparticles Modified SnO2 Film Patterns

“…A high‐quality patterning of the gas sensing films in the central sensing areas of the micro hotplates ensures full exposure of the test electrode and heating electrode pads, and avoids signal crosstalk caused by the over‐coverage of sensing film, which is the basis for chip packaging and testing. [ 25 ] We prepared 150 µm×150 µm square SnO 2 film patterns on a silicon wafer to evaluate the as‐used method. As shown in Figure 2d, the square film patterns are well deposited on the substrate without any deformation and the edges are very smooth.…”

“…[21][22][23][24] At the same time, these methods are easy to cause contact between the sensing materials and the electrode pad, resulting in signal crosstalk between heating electrode and testing electrode, and even affect the effectiveness of the subsequent packaging. [25] In addition, noble metal catalysts are very useful to improve gas sensitivity and selectivity. [26][27][28] For example, Duan et al [29] established Pd to modulate the kinetic process of gas sensing reaction, and promote the detection ability to H 2 S. Zhang et al [30] deposited Pt catalysts on the SnO 2 film, which significantly decreased the operating temperature and showed a very high response and a low detection limit toward triethylamine gas.…”

“…[ 21–24 ] At the same time, these methods are easy to cause contact between the sensing materials and the electrode pad, resulting in signal crosstalk between heating electrode and testing electrode, and even affect the effectiveness of the subsequent packaging. [ 25 ] In addition, noble metal catalysts are very useful to improve gas sensitivity and selectivity. [ 26–28 ] For example, Duan et al.…”

Measurement of low‐loss aqueous solutions permittivity with high detection accuracy by a contact and free‐label resonance microwave sensor

“…The sensor used in the upcoming design is a combination of three parts, MS, LS, and TS. These three structures have been used independently in various paper, for example, MS in Li et al, 58 LS in Yazdi et al, 59 and TS in Xue et al 60 have been used.…”

Strategic report on MEMS based carbon monoxide sensor technology for environmental air quality monitoring using unmanned aerial vehicle

“…The sensor was very efficient to measure CO gas with the power consumption was about 21.92 mW [109].…”