A Low Power Bridge-Type Gas Sensor With Enhanced Sensitivity to Ethanol by Sandwiched ZnO/Au/ZnO Film Sputtered in O₂ Atmosphere

Liu, Ruichen; Xie, Dongcheng; Adedokun, George; Xue, Feng; Xu, Lei; Feng, Wei

doi:10.1109/jsen.2021.3088990

Cited by 5 publications

(3 citation statements)

References 43 publications

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“…Sputter deposition allows precise control of deposition conditions, substrate temperature, and sputter power. The gas-sensitive film produced by the sputtering deposition method has the advantages of high quality and marvelous adhesion [ 74 ]. J. Zeng et al prepared WO 3 sensors by magnetron sputtering.…”

Section: Gas Sensitive Materials Coatingmentioning

confidence: 99%

Research Progress on Coating of Sensitive Materials for Micro-Hotplate Gas Sensor

2022

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Micro-hotplate gas sensors are widely used in air quality monitoring, identification of hazardous chemicals, human health monitoring, and other fields due to their advantages of small size, low power consumption, excellent consistency, and fast response speed. The micro-hotplate gas sensor comprises a micro-hotplate and a gas-sensitive material layer. The micro-hotplate is responsible for providing temperature conditions for the sensor to work. The gas-sensitive material layer is responsible for the redox reaction with the gas molecules to be measured, causing the resistance value to change. The gas-sensitive material film with high stability, fantastic adhesion, and amazing uniformity is prepared on the surface of the micro-hotplate to realize the reliable assembly of the gas-sensitive material and the micro-hotplate, which can improve the response speed, response value, and selectivity. This paper first introduces the classification and structural characteristics of micro-hotplates. Then the assembly process and characteristics of various gas-sensing materials and micro-hotplates are summarized. Finally, the assembly method of the gas-sensing material and the micro-hotplate prospects.

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Section: Gas Sensitive Materials Coatingmentioning

confidence: 99%

Research Progress on Coating of Sensitive Materials for Micro-Hotplate Gas Sensor

2022

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“…The observed sensitivity for the measurement of ethanol gas about 100 ppm. The power consumed by the sensor was 12.17 mW [100,101].…”

Section: Recent Trends On Mems Based Gas Sensing Technologymentioning

confidence: 99%

Strategic report on MEMS based carbon monoxide sensor technology for environmental air quality monitoring using unmanned aerial vehicle

2022

IJATEE

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“…ZnO is an n-type semiconductor with a large bandgap energy (3.37 eV), large exciton binding energy (0.06 eV), high chemical stability, excellent optical properties, non-toxicity, a low dielectric constant, and it is suitable for gas detection [ 31 , 32 , 33 ]. As one of the most promising optical gas-sensing materials, ZnO nanomaterials have controllable morphology, excellent near-band edge ultraviolet (UV) emission properties, high oxygen-adsorption capacity, and low-cost preparation methods [ 22 , 23 ].…”

Section: Introductionmentioning

confidence: 99%

Novel Au Nanoparticle-Modified ZnO Nanorod Arrays for Enhanced Photoluminescence-Based Optical Sensing of Oxygen

Zhang

et al. 2023

Sensors

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Novel optical gas-sensing materials for Au nanoparticle (NP)-modified ZnO nanorod (NR) arrays were fabricated using hydrothermal synthesis and magnetron sputtering on Si substrates. The optical performance of ZnO NR can be strongly modulated by the annealing temperature and Au sputtering time. With exposure to trace quantities of oxygen, the ultraviolet (UV) emission of the photoluminescence (PL) spectra of Au/ZnO samples at ~390 nm showed a large variation in intensity. Based on this mechanism, ZnO NR based oxygen gas sensing via PL spectra variation demonstrated a wide linear detection range of 10–100%, a high response value, and a 1% oxygen content sensitivity detection limit at 225 °C. This outstanding optical oxygen-sensing performance can be attributed to the large surface area to volume ratio, high crystal quality, and high UV emission efficiency of the Au NP-modified ZnO NR arrays. Density functional theory (DFT) simulation results confirmed that after the Au NPs modified the surface of the ZnO NR, the charge at the interface changed, and the structure of Au/ZnO had the lowest adsorption energy for oxygen molecules. These results suggest that Au NP-modified ZnO NR are promising for high-performance optical gas-sensing applications.

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A Low Power Bridge-Type Gas Sensor With Enhanced Sensitivity to Ethanol by Sandwiched ZnO/Au/ZnO Film Sputtered in O₂ Atmosphere

Cited by 5 publications

References 43 publications

Research Progress on Coating of Sensitive Materials for Micro-Hotplate Gas Sensor

Research Progress on Coating of Sensitive Materials for Micro-Hotplate Gas Sensor

Strategic report on MEMS based carbon monoxide sensor technology for environmental air quality monitoring using unmanned aerial vehicle

Novel Au Nanoparticle-Modified ZnO Nanorod Arrays for Enhanced Photoluminescence-Based Optical Sensing of Oxygen

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