2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) 2021
DOI: 10.1109/transducers50396.2021.9495548
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A Low Power 4-Channel Single-Cantilever Metal-Oxide Gas Sensor Cell with Gas Identification Capability

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“…The researchers were designed four channel gas sensor structure and MOx material was used the researchers were used sputtering technique for deposition of SnO 2 for the sensing layer. The observed power consumption was about 8.55 mW and the optimised response is achieved for 50 ppm of hydrogen (H 2 ) as well as ammonia (NH 3 ) [90].…”
Section: Recent Trends On Mems Based Gas Sensing Technologymentioning
confidence: 99%
“…The researchers were designed four channel gas sensor structure and MOx material was used the researchers were used sputtering technique for deposition of SnO 2 for the sensing layer. The observed power consumption was about 8.55 mW and the optimised response is achieved for 50 ppm of hydrogen (H 2 ) as well as ammonia (NH 3 ) [90].…”
Section: Recent Trends On Mems Based Gas Sensing Technologymentioning
confidence: 99%