“…The researchers were designed four channel gas sensor structure and MOx material was used the researchers were used sputtering technique for deposition of SnO 2 for the sensing layer. The observed power consumption was about 8.55 mW and the optimised response is achieved for 50 ppm of hydrogen (H 2 ) as well as ammonia (NH 3 ) [90].…”
Section: Recent Trends On Mems Based Gas Sensing Technologymentioning
“…The researchers were designed four channel gas sensor structure and MOx material was used the researchers were used sputtering technique for deposition of SnO 2 for the sensing layer. The observed power consumption was about 8.55 mW and the optimised response is achieved for 50 ppm of hydrogen (H 2 ) as well as ammonia (NH 3 ) [90].…”
Section: Recent Trends On Mems Based Gas Sensing Technologymentioning
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