A low power 2-D raster scanning MEMS mirror driven by hybrid electrothermal and electromagnetic actuation mechanisms

Koh, Kah How; Lee, Chengkuo

doi:10.1109/omems.2012.6318890

Cited by 4 publications

(3 citation statements)

References 3 publications

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“…Electrothermal actuation is not suitable for micromirror laser line generators because of its long response times [24,25]. If combined with a fast scanner, this method may be suitable for a 2D scanner.…”

Section: Actuation Principlesmentioning

confidence: 99%

Development of micromirror-based laser line generator

Nia¹

2021

Preprint

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A laser line generator projects a straight line on an object and is widely used for alignment, identification, barcode reading, etc. Conventional laser line generators make use of cylindrical and Powell lenses that convert a laser beam spot into a line. Because of a fixed fan angle, however, the length and brightness of the generated line depends on the working distance between the laser module and object. In this project, using the optical system design software Zemax and engineering CAD software Solidworks, a micromirror based laser line generator is designed and fabricated. The performance of the fabricated micromirror based laser line generator is tested and compared with the performance of a conventional laser line generator. The results show that the length and brightness of image line can be kept constant by the designed generator.

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Section: Actuation Principlesmentioning

confidence: 99%

Development of micromirror-based laser line generator

Nia¹

2021

Preprint

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“…To function for this purpose a slow ET actuator would need to be paired with a different actuation scheme for the fast axis. 2D ET scanners using ES and EM, respectively, for the fast axis have been reported [49], [50], but it remains to be proven if it is a viable idea or not.…”

Section: D Scannersmentioning

confidence: 99%

MEMS Laser Scanners: A Review

Holmström

Baran

Ürey

2014

J. Microelectromech. Syst.

393

175

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Laser scanners have been an integral part of MEMS research for more than three decades. During the last decade, miniaturized projection displays and various medicalimaging applications became the main driver for progress in MEMS laser scanners. Portable and truly miniaturized projectors became possible with the availability of red, green, and blue diode lasers during the past few years. Inherent traits of the laser scanning technology, such as the very large color gamut, scalability to higher resolutions within the same footprint, and capability of producing an always-in-focus image render it a very viable competitor in mobile projection. Here, we review the requirements on MEMS laser scanners for the demanding display applications, performance levels of the best scanners in the published literature, and the advantages and disadvantages of electrostatic, electromagnetic, piezoelectric, and mechanically coupled actuation principles. Resonant high-frequency scanners, low-frequency linear scanners, and 2-D scanners are included in this review. [2013-0235]

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“…The structure design and driving principles are the two key points for actuators. So far, various driving modes have been studied, such as thermal expansion [ 8 , 9 ], electrostatic force [ 10 , 11 , 12 ], piezoelectric effect [ 13 , 14 ], shape memory alloys [ 15 , 16 ], and electromagnetic force driving [ 17 , 18 , 19 ], and a hybrid of thermal and electromagnetic methods [ 20 ]. Additionally, metamaterials were designed as the driving units in the MEMS actuators in recent years [ 21 , 22 , 23 ].…”

Section: Introductionmentioning

confidence: 99%

Design and Fabrication of a MEMS Electromagnetic Swing-Type Actuator for Optical Switch

et al. 2021

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A microelectromechanical systems system (MEMS) electromagnetic swing-type actuator is proposed for an optical fiber switch in this paper. The actuator has a compact size of 5.1 × 5.1 × 5.3 mm3, consisting of two stators, a swing disc (rotator), a rotating shaft, and protective covers. Multi-winding stators and a multipole rotator were adopted to increase the output torque of the actuator. The actuator’s working principle and magnetic circuit were analyzed. The calculation results show that the actuator’s output torque is decisive to the air gap’s magnetic flux density between the stators and the swing disc. NiFe alloy magnetic cores were embedded into each winding center to increase the magnetic flux density. A special manufacturing process was developed for fabricating the stator windings on the ferrite substrate. Six copper windings and NiFe magnetic cores were electroplated onto the ferrite substrates. The corresponding six magnetic poles were configured to the SmCo permanent magnet on the swing disc. A magnetizing device with a particular size was designed and fabricated to magnetize the permanent magnet of the swing disc. The actuator prototype was fabricated, and the performance was tested. The results show that the actuator has a large output torque (40 μNm), fast response (5 ms), and a large swing angle (22°).

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A low power 2-D raster scanning MEMS mirror driven by hybrid electrothermal and electromagnetic actuation mechanisms

Cited by 4 publications

References 3 publications

Development of micromirror-based laser line generator

Development of micromirror-based laser line generator

MEMS Laser Scanners: A Review

Design and Fabrication of a MEMS Electromagnetic Swing-Type Actuator for Optical Switch

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