A low-g omnidirectional MEMS inertial switch with load direction identification

A novel MEMS inertial switch with frictional electrode

“…Figure 11 shows the comparison of the contact time. The theoretical contact time of the flexible switch and rigid switch is obtained from equation ( 12) and the contact time of frictional switch is obtained from equation (13). It can be seen from figure 11 that the contact time obtained by the simulation analysis is consistent with the theoretical results.…”

“…Switch signal is shown in figure 4(c). According to the previous test experience [13] and test data [1,2,6], inertial switch is always closed near the point of maximum acceleration, so t r ≈ t 0 /2.…”

“…Rigid switch and flexible switch are shown in figures 1(a) and (c) [13][14][15][16][17][18], respectively. Flexible switch enhances contact to a certain extent due to its low-stiffness electrode [19].…”

“…The second is electrode layer, including the main structure component such as spring, electrode and mass, whose fabrication accuracy has a significant influence on the threshold acceleration. To obtain a larger mass and ensure threshold precision of the switch, mass compensation is carried out on the third layer [13].…”

“…Among these methods, improving electrode flexibility is considered to be a better way, while electrostatic force assistant has disadvantages of electromagnetic interference [12], and the introduction of squeeze film damping requires the production of a suspended largearea non-porous mass. In our previous work, improving electrode flexibility has been proved effective in enhancing contact performance [3,13]. However, it is difficult to further prolong the contact time sometimes limited by the size of the switch structure.…”