A novel MEMS inertial switch with frictional electrode

Abstract

This paper presents a frictional MEMS inertial switch with aiming to solve the problems of short contact time and bounce. According to contact principle in MEMS inertial switch, a new enhanced contact method by friction is proposed and a frictional switch is designed. To compare the frictional switch with common rigid switch and flexible switch, three switches were fabricated by micro electroforming technology and tested by a standard dropping hammer system. The tested results show that the contact time of rigid switch, flexible switch and frictional switch is 13 μs, 85 μs and 620 μs, respectively. Both rigid switch and flexible switch have bounce problem, while frictional switch is closed stably without bounce phenomenon. Frictional MEMS inertial switch has great advantages in enhancing contact.

Solving the Bonding Problem of the Ni Thin Coating with the Ultrasonic Assisted Electrochemical Potential Activation Method

“…The electroplated Ni coating on carbon fiber can enhance the shielding effect of the sensor, which has the potential application of the MEMS pressure sensor [ 10 ]. To solve the short contact time, the electroplated Ni coating was applied to fabricate a novel inertial friction switch [ 11 ]. Under deep sea surroundings, the electroplated Ni coating was used to restore the wear shaft sleeve of the micro electric motor [ 12 ].…”