A large deflection and high payload flexure-based parallel manipulator for UV nanoimprint lithography: Part II. Stiffness modeling and performance evaluation

Integrating mechanism synthesis and topological optimization technique for stiffness-oriented design of a three degrees-of-freedom flexure-based parallel mechanism

“…3 where {1}, {2}, and {3} have a z-axis rotation angle of [˛1˛2˛3] = [ /3 − /3] with respect to the global frame g respectively. Based on the classical mechanism stiffness modeling approach [14,22], the compliance matrix of kinematic chain i, C chain i , at the PR joint loading point can be determined by…”

Design and development of a novel monolithic compliant XY stage with centimeter travel range and high payload capacity

“…But some special applications such as UltraViolet Nanoimprint Lithography (UV-NIL) and soft-contact lithography (Teo, 2014;Qu, 2014) expect that the CPS has not only large travel range, but also large out-of-plane payload carrying capacity without any other auxiliary supporting equipment. Moreover, restrained by space limitation, compact mechatronic design of CPS is usually expected.…”

“…Parallel XY stage (PXYS) is the most common layout of XY stages because of its advantages including identical dynamic features in working axes, low inertia, and low cumulative positioning errors (Teo, 2014). In order to obtain parallel XY stages with large travel and compact size, leaf spring parallelograms are widely used as prismatic (P) joints.…”

Consistent modeling resolves asymmetry in stiffness matrices

“…Jacobian-based stiffness analysis methods have been developed both for serial manipulators [6,7] and parallel manipulators [8][9][10][11][12]. These stiffness analysis methods have been used for the analysis of a wide range of parallel manipulators, such as machining robots [1,13,14], haptic devices [15,16], and precision manipulators [17,18].…”