“…In adaptive optical setups, the wavefront is controlled by a deformable mirror for which various different mechanisms of actuation have been demonstrated. Existing techniques include pneumatic principles (Moghimi et al 2014), thermal actuation (Vdovin and Loktev 2002), electromagnetic actuators (Hamelinck et al 2004, Wu et al 2011, ferrofluids (Brousseau et al 2008, Balderas-Mata et al 2011, and piezo actuators (Forbes et al 1989, Rodrigues et al 2009, Verpoort and Wittrock 2010, Rausch et al 2012. Among the latter, thin-film diaphragms with segmented electrodes are widely employed mostly for their design simplicity, low number of required components and high performance in terms of achievable speed and accuracy.…”