A KrF-laser excited by a capacitively coupled longitudinal discharge

Gerber, T.; Peters, Peter J.; Bastiaens, Hubertus M.J.

doi:10.1016/0030-4018(85)90026-4

Cited by 9 publications

(4 citation statements)

References 6 publications

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“…Figure 8 shows the laser output energy as a function of U. for the circuit D. A maximum energy of 200 pJ and an efficiency (output energy in relation to storage capacitor energy) of 0.1% was obtained. This compares favourably with the value of 0.02% calculated with the data of [ 5 ] .…”

Section: Pure Capacitively Excited Dischargesupporting

confidence: 86%

“…A maximum pulse energy of 200 pJ was observed, which is smaller than that obtained in [5] using an excitation voltage of 300 kV. However, our laser discharge was operated with a smaller voltage of only 84 kV and gave a comparatively higher efficiency of 0.1 % .…”

Section: Discussionmentioning

confidence: 58%

“…The capillary laser tubes used up to now were all made of glass but were excited with different discharge circuits. Gerber and co-workers [5] reported the highest output energies of such lasers up to 0.9 mJ in pulses with 6 ns FWHM duration. The total efficiency of such laser systems and the lifetime of the gas mixture have not yet been optimised.…”

Section: Miniature Excimer Lasers With Capillary Discharges Have Been...mentioning

confidence: 99%

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Longitudinal KrF lasers with improved efficiency and operating period

Rosa¹,

Hamisch²,

Eichler³

1988

J. Phys. D: Appl. Phys.

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Reports the investigation of the discharge current and voltage in longitudinal KrF lasers with internal and external capacitive electrodes. Laser action in F2:Kr:He mixtures in a capacitively coupled discharge was observed with output energies up to 200 mu J and 0.1% efficiency in a discharge tube with diameter 2 mm, length 35 cm and a driving voltage of 84 kV. Factors which influence the operating period were investigated. A maximum lifetime of 104 shots for 3 l of gas mixture was obtained.

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Section: Pure Capacitively Excited Dischargesupporting

confidence: 86%

Section: Discussionmentioning

confidence: 58%

Section: Miniature Excimer Lasers With Capillary Discharges Have Been...mentioning

confidence: 99%

See 1 more Smart Citation

Longitudinal KrF lasers with improved efficiency and operating period

Rosa¹,

Hamisch²,

Eichler³

1988

J. Phys. D: Appl. Phys.

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“…For pulsed discharge, there are no techniques for reliable measurement of the part of the energy that is directly deposited in the plasma. Basically, the energy deposition is measured in the whole system, including the commutator and the discharge gap [1][2][3]. Among the large number of forms of pulsed discharges one is especially important: it is the so-called stage of a fast breakdown or, in other words, fast ionization waves (FIW) [4,5].…”

Section: Introductionmentioning

confidence: 99%

Dependence of the energy deposition of a fast ionization wave on the impedance of a discharge gap

Красночуб¹,

Vasilyak

2001

J. Phys. D: Appl. Phys.

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Analyses of experimental and theoretical investigations of energy dissipation in a pulse discharge are reported. The pulse discharge has been investigated in the form of fast ionization waves. The dependence of part of the energy deposition on the impedance discharge cell is found. From the presented model it follows that at high values of the impedance of the discharge cell the energy deposition is determined by the front of the ionization wave, and, in the opposite case, at small values of the impedance it is determined by the charging of the discharge cell capacitance and by joule's losses. The part of the energy deposition in the fast ionization wavefront is estimated to be 20-45%. The conditions at which up to 100% energy deposition is achieved.

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KrF-laser without buffer gas excited in a capacitively coupled discharge tube

Rosa

Eichler

1987

Optics Communications

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A KrF-laser excited by a capacitively coupled longitudinal discharge

Cited by 9 publications

References 6 publications

Longitudinal KrF lasers with improved efficiency and operating period

Longitudinal KrF lasers with improved efficiency and operating period

Dependence of the energy deposition of a fast ionization wave on the impedance of a discharge gap

KrF-laser without buffer gas excited in a capacitively coupled discharge tube

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