Longitudinal KrF lasers with improved efficiency and operating period

Rosa, J. de la; Hamisch, J.; Eichler, H. J.

doi:10.1088/0022-3727/21/9/005

Cited by 3 publications

References 10 publications

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Lasers, Gas

Eichler

Usenov

2018

The Optics Encyclopedia

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This article reviews the characteristics of gas lasers that are important as both scientific and industrial tools. The basic principles common to the operation of all gas lasers and a few of their general properties are discussed. The lasers are categorized according to the pumping mechanisms of the upper laser level: electron impact excitation (copper and gold lasers and argon‐ and krypton‐ion lasers), excitation transfer (He–Ne laser, He–Cd laser, and CO 2 laser), reactive collision lasers (excimer lasers: ArF, KrF, XeCl, and XeF), chemical lasers (HF and iodine laser), and other lasers in the far‐infrared (IR), ultraviolet, and X‐ray regions. Selected applications of pulsed and continuous gas lasers are presented in material processing, marking and laser evaporation, microlithography, photochemical processing, stereolithography, and medicine.

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Lasers, Gas

Eichler

Usenov

2018

The Optics Encyclopedia

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Discharge characterization of a longitudinal KrF laser by spectroscopic measurements

Herweg¹,

Taubert²,

König³

et al. 1992

J. Phys. D: Appl. Phys.

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Time-resolved and integrated fluorescence spectral of a capacitively coupled longitudinal KrF excimer laser were measured in the UV visible range. Similar investigations were also carried out with a transversally pumped commercial excimer laser with a standard KrF gas fill. Both lasers were found to have very different spectra. The longitudinal laser showed very strong excitation of rare gas ions. Such high ion densities are avoided in transversal discharges by keeping the discharge homogeneous. However, the longitudinal discharge is capacitively self-stabilized so that no breakdown occurs.

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