2020
DOI: 10.1007/s42341-020-00222-y
|View full text |Cite
|
Sign up to set email alerts
|

A Journey from Bulk MOSFET to 3 nm and Beyond

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1

Citation Types

0
11
0

Year Published

2021
2021
2024
2024

Publication Types

Select...
8
2

Relationship

0
10

Authors

Journals

citations
Cited by 32 publications
(14 citation statements)
references
References 66 publications
0
11
0
Order By: Relevance
“…This is because, as Germanium concentration increases intrinsic carrier density increases and hence it would be better to choose a mole-fraction which can give high carrier density without reducing the mobility of carriers at the pocket-channel material junction for this device. Usage of Si 1-x Ge x mole fraction has also shown to reduce the gate to drain capacitance in the past which greatly effects gain bandwidth product (GBP) 40 .
Figure 1 ( a ) Schematic structure of poc-DG-AJLTFET.
…”
Section: Device Description and Simulationmentioning
confidence: 99%
“…This is because, as Germanium concentration increases intrinsic carrier density increases and hence it would be better to choose a mole-fraction which can give high carrier density without reducing the mobility of carriers at the pocket-channel material junction for this device. Usage of Si 1-x Ge x mole fraction has also shown to reduce the gate to drain capacitance in the past which greatly effects gain bandwidth product (GBP) 40 .
Figure 1 ( a ) Schematic structure of poc-DG-AJLTFET.
…”
Section: Device Description and Simulationmentioning
confidence: 99%
“…Increasing gate numbers can also decrease λ according to (1), and that is why FinFET with three sides of the channel surrounded by the gates performs better than planar FET in regards to suppressing SCE [8]. Recently, GAA-FET has been predicted to replace FinFET and dominate the semiconductor market for 3 nm technology node and beyond, since GAA-FET has better gate control and stronger SCE suppression ability than FinFET attributing to its surrounding gate structure [9].…”
Section: Introductionmentioning
confidence: 99%
“…When using such consumable quartz parts for the process equipment, they can easily generate particles and gases of metal impurities when they are exposed to high-temperature and -pressure processes [ 6 ] because their raw material is purified from natural rocks with an impurity level of up to 10 ppm in metal ions such as Fe, Al, Ni, and Zn. Recently, since the channel length of metal–oxide–semiconductor field-effect transistors (MOSFETs) has been scaled down to 3 nm to achieve faster speed, lower power consumption, and higher integration density [ 7 ], ultra-high-purity synthetic quartz powder with an impurity level of less than 100 parts per billion (ppb) in metal ions is essential so that the fabricating devices are not contaminated by metallic impurities generated from such quartz parts during the fabrication process [ 8 , 9 ]. In addition, for quartz crucibles used in Czochralski technology, a 3 nm thick inner layer of quartz crucible is fabricated by fusing and coating synthetic quartz powder instantaneously on the inner surface of a quartz crucible formed of natural quartz through the arc plasma process.…”
Section: Introductionmentioning
confidence: 99%