Abstract:Articles you may be interested in XY stage driven by ultrasonic linear motors for the electron-beam x-ray mask writer EB-X3 J.A servo guided X-Y-theta stage for electron beam lithography J. Vac. Sci. Technol. B 9, 3019 (1991); 10.1116/1.585361Yaw corrected precision X-Y stage for high-throughput electron-beam lithography systems A hydraulic X-Y stage system for application in electron beam lithography machines is described. The X-Y table is supported on hydrostatic bearings and is driven hydraulically. This sy… Show more
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