A hybrid<i>in situ</i>monitoring strategy for optical coating deposition: application to the preparation of chirped dielectric mirrors

Stenzel, Olaf; Wilbrandt, Steffen; Fasold, D.; Kaiser, Norbert

doi:10.1088/1464-4258/10/8/085305

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Cited by 9 publications

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“…This includes adjustment of deposition parameters, recalibration of the monitoring system, correction of tooling factors, etc. [1][2][3][4]. The reliability of the RE results depends on the experimental data set as well as on the stability of the corresponding numerical algorithms [1,3,5].…”

Section: Introductionmentioning

confidence: 99%

“…[1][2][3][4]. The reliability of the RE results depends on the experimental data set as well as on the stability of the corresponding numerical algorithms [1,3,5]. Some numerical algorithms (for example, sequential algorithm processing transmittance scans recorded in situ during the deposition) cannot provide correct RE results [5,6].…”

Section: Introductionmentioning

confidence: 99%

“…This may include estimations of the level of errors in layer thicknesses derived by careful characterization or information regarding the stability/ instability of refractive indices of thin-film materials [2,3], the presence/absence of bulk inhomogeneity, surface roughness, etc.…”

Section: Introductionmentioning

confidence: 99%

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