A hinged-pad test structure for sliding friction measurement in micromachining

Boer, Maarten P. de; Redmond, James M.; Michalské, Terry A.

doi:10.1117/12.324066

Cited by 29 publications

(12 citation statements)

References 20 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…However, it has been shown that relationship (10) does not hold at the microscale [9]. This discrepancy is due to the dependence of the engineering coefficient of friction on various attractive (adhesion) forces arising at the contact interface, which are not included in (6).…”

Section: A Static Friction Of Sidewall Contact Interfacesmentioning

confidence: 91%

“…According to traditional (macroscopic) friction theories (e.g., Coulomb friction), the interfacial shear strength varies linearly with the external contact pressure, i.e., (10) where is the conventional (engineering) coefficient of friction given by (6). However, it has been shown that relationship (10) does not hold at the microscale [9].…”

Section: A Static Friction Of Sidewall Contact Interfacesmentioning

confidence: 97%

“…In the new design, a suspended microstructure was pulled into contact with the substrate by a gap closing actuator, and the friction force at the instant of lateral displacement (generated by comb-drive actuators) was determined from voltage-force relationships. To study friction at the MEMS level, de Boer et al [10] designed a surface micromachine capable of generating nanoscopic relative movement between the contacting surfaces. These studies have provided valuable information about the friction properties of in-plane polycrystalline silicon (polysilicon) surfaces.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

The Effect of Adhesion on the Static Friction Properties of Sidewall Contact Interfaces of Microelectromechanical Devices

Timpe

Komvopoulos

2006

J. Microelectromech. Syst.

View full text Add to dashboard Cite

Static friction between sidewall contact surfaces of polycrystalline silicon micromachines was investigated under different contact pressures, vacuum conditions, relative humidity levels, and temperatures. The static coefficient of friction exhibited a nonlinear dependence on the external contact pressure. A difference between in-contact and pull-out adhesion forces was observed due to the elastic recovery of the deformed asperities at the contact interface. The true static coefficient of friction was determined by considering the effects of the dominant adhesion forces (i.e., van der Waals and capillary forces) on the normal force applied at the sidewall contact interface. The roles of van der Waals and capillary forces in the sidewall friction behavior were analyzed in light of results for the interfacial shear strength and the adhesion force. The major benefits of the present friction micromachine and the developed experimental scheme are discussed in the context of static coefficient of friction and adhesion force results obtained under different environmental and loading conditions.[1753]

show abstract

Section: A Static Friction Of Sidewall Contact Interfacesmentioning

confidence: 91%

Section: A Static Friction Of Sidewall Contact Interfacesmentioning

confidence: 97%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

The Effect of Adhesion on the Static Friction Properties of Sidewall Contact Interfaces of Microelectromechanical Devices

Timpe

Komvopoulos

2006

J. Microelectromech. Syst.

View full text Add to dashboard Cite

show abstract

“…Much of the early work on surface characterization and friction testing has been discussed by Komvopoulos [10]. Senft and Dugger [11] and de Boer et al [12] conducted friction and adhesion experiments using micromachined test structures. Flater et al [13] performed wear experiments with a surface micromachine that generated nanoscopic sliding at the contact interface.…”

Section: Introductionmentioning

confidence: 99%

Wear of Polysilicon Surface Micromachines Operated in High Vacuum

Timpe

Alsem

Hook

et al. 2009

J. Microelectromech. Syst.

View full text Add to dashboard Cite

The evolution of wear at sidewall surfaces of polysilicon microelectromechanical systems was investigated in high vacuum under controlled normal load and sliding speed conditions. The static adhesion force was used as an indicator of the changes in wear characteristics occurring during oscillatory sliding contact. Measurements of the static adhesion force as a function of sliding cycles and scanning electron microscopy observations of micromachines from the same batch process subjected to nominally identical testing conditions revealed two distinctly different tribological patterns, namely, low-adhesion/high-wear behavior and high-adhesion/low-wear behavior. The static adhesion force and wear behavior were found to be in direct correlation with the micromachine operational lifetime. Transmission electron microscopy, selected area diffraction, and energy dispersive X-ray spectroscopy yielded insight into the origin, microstructure, and composition of wear debris and agglomerates adhered onto the sliding surfaces. Results demonstrate a strong dependence of micromachine operational life on the removal of the native oxide film and the organic monolayer coating as well as the formation of agglomerates consisting of organic coating material and wear debris.[2008-0121]

show abstract

“…From a model of the motion of the motor under the influence of electrical stimuli, the dynamic coefficient of friction can be calculated. De Boer et al [12,13] developed a dedicated friction measurement device that uses a cantilever beam bent by electrostatic actuation, causing a hinged pad to slide over a counter-surface. By monitoring the bending of the cantilever at a certain applied actuation voltage with an optical interferometer, they could measure the static coefficient of friction as a function of normal load.…”

Section: Mems Tribometersmentioning

confidence: 99%

The Leiden MEMS Tribometer: Real Time Dynamic Friction Loop Measurements With an On-Chip Tribometer

Spengen

Frenken

2007

Tribol Lett

View full text Add to dashboard Cite

On-chip MEMS tribometer devices until now have been much less sophisticated for dynamically sensing frictional forces than their FFM (friction force microscope) counterparts. In this article, we present a MEMS-based tribometer that can be used to measure dynamically, onchip and in-situ, the frictional properties of MEMS-scale contact geometries. The device provides the first FFM-like friction loops with contacting MEMS sidewall surfaces. Depending on the normal load two regimes of operation are identified. At low and intermediate loads, the frictional behaviour reflects wear-less relative motion of the silicon oxide surfaces of the MEMS device and we observe repeatable, irregular stick-slip behaviour, related to the surface roughness. At very high loads, wear causes changes in the topography of the contacting surfaces.

show abstract

A hinged-pad test structure for sliding friction measurement in micromachining

Abstract: We describe the design, modeling, fabrication and initial testing of a new test structure ,

Cited by 29 publications

References 20 publications

The Effect of Adhesion on the Static Friction Properties of Sidewall Contact Interfaces of Microelectromechanical Devices

The Effect of Adhesion on the Static Friction Properties of Sidewall Contact Interfaces of Microelectromechanical Devices

Wear of Polysilicon Surface Micromachines Operated in High Vacuum

The Leiden MEMS Tribometer: Real Time Dynamic Friction Loop Measurements With an On-Chip Tribometer

Contact Info

Product

Resources

About