2013
DOI: 10.1063/1.4790278
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A high-temperature piezoelectric linear actuator operating in two orthogonal first bending modes

Abstract: Conventionally, piezoelectric ultrasonic linear actuators operate in longitudinal and bending combination (degenerate) modes for producing an elliptic motion which drives a slider moving linearly. With the increasing temperature, the degenerate mode will split into two separated modes again, resulting in piezoelectric actuators working to fail. Here, we report a miniature piezoelectric ultrasonic linear actuator made of Mn modified (1−x)BiScO3–xPbTiO3 piezoelectric ceramics operating in two orthogonal first be… Show more

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Cited by 22 publications
(18 citation statements)
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“…These compounds are being investigated extensively as alternative to state-of-the-art Pb(Zr,Ti)O3 (PZT) for expanding the operation temperature of high sensitivity piezoelectric ceramics beyond 200 ºC, up to 400 ºC [7][8][9].…”
Section: Introductionmentioning
confidence: 99%
“…These compounds are being investigated extensively as alternative to state-of-the-art Pb(Zr,Ti)O3 (PZT) for expanding the operation temperature of high sensitivity piezoelectric ceramics beyond 200 ºC, up to 400 ºC [7][8][9].…”
Section: Introductionmentioning
confidence: 99%
“…A history of commercial success was achieved using circular traveling wave-based stators transmitting its energy to a rotor [6,7], with the capability of bidirectional movement. Standing-wave-based motors were also reported, with the requirement of legs to induce the movement of the rotor [8], as well as the proper mixing of two standing waves at the same frequency, with either a bending and a longitudinal mode [9] or two bending modes [10].…”
Section: Introductionmentioning
confidence: 99%
“…The former mostly use a piezoelectric stator to excite a single vibration mode or two combined vibration modes to produce 1-DOF motion, and various types of 1-DOF USMs have been reported. [8][9][10][11][12][13][14] The latter normally use one piezoelectric stator containing multiple piezoelectric elements, or use multiple piezoelectric stators to excite two or more vibration modes to produce multi-DOF motion. 15 Nakamura et al proposed the first multi-DOF stick-type USM in 1998.…”
Section: Introductionmentioning
confidence: 99%