A two degrees-of-freedom piezoelectric single-crystal micromotor

Chen, Zhijiang; Li, Xiaotian; Liu, Guoxi; Dong, Shuxiang

doi:10.1063/1.4903834

Cited by 40 publications

(9 citation statements)

References 22 publications

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“…Academic research groups are also reporting interesting findings using L1B2 mode. A single crystal-based stator with 2 mm × 2 mm × 9 mm has demonstrated 2-degrees-of-freedom linear motions with a force of 250 mN and a velocity of 35 mm/s [117]. The smallest one of using L1B2 mode might be 5 mm × 1.5 mm × 1.45 mm, but the performance parameters have not been indicated [118].…”

Section: Review Of Linear Ultrasonic Micromotorsmentioning

confidence: 99%

Review: Recent Advances in Micromotors

Mashimo

Izuhara

2020

IEEE Access

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Micromotors are of great interest not only for the miniaturization of current products but also for the realization of future micromachines that can explore challenging environments. The speed of downsizing actuators is slower than that of semiconductor components, but developments over the last two decades have overcome several difficulties and enabled engineers to start designing applications. In this paper, we review the existing micromotors ranging from famous papers to state-of-the-art, in particular recent developments and their applications. We deal with three representative principles for rotary and linear micromotors: electromagnetics, electrostatics, and piezoelectricity. Another purpose of this paper is to suggest design criteria and physical limitations on these principles for engineers who design millimeter-scale automation devices. Incorporating micromotors can permit space saving and improve design flexibility in application designs, such as smartphones and medical devices.

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Section: Review Of Linear Ultrasonic Micromotorsmentioning

confidence: 99%

Review: Recent Advances in Micromotors

Mashimo

Izuhara

2020

IEEE Access

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“…It can be seen that the step motion velocity decreases almost linearly with the load, and it is found that the max load force of the DMMLA in step mode is 5.5 N. The relationship of displacement and time under different loading condition is presented in Figure S5. Compared with ultrasonic motors, the step mode of the DMMLA apparently shows a better loading performance due to its quasistatic motion [36,37].…”

Section: Piezoelectricmentioning

confidence: 99%

A Piezoelectric and Electromagnetic Dual Mechanism Multimodal Linear Actuator for Generating Macro- and Nanomotion

Gao

et al. 2019

Research

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Fast actuation with nanoprecision over a large range has been a challenge in advanced intelligent manufacturing like lithography mask aligner. Traditional stacked stage method works effectively only in a local, limited range, and vibration coupling is also challenging. Here, we design a dual mechanism multimodal linear actuator (DMMLA) consisted of piezoelectric and electromagnetic costator and coslider for producing macro-, micro-, and nanomotion, respectively. A DMMLA prototype is fabricated, and each working mode is validated separately, confirming its fast motion (0~50 mm/s) in macromotion mode, micromotion (0~135 μm/s) and nanomotion (minimum step: 0~2 nm) in piezoelectric step and servomotion modes. The proposed dual mechanism design and multimodal motion method pave the way for next generation high-precision actuator development.

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“…The second kind of structure is the compact structure in parallel [6][7][8][9], for which the motions often share a common friction interface [6,8] that leads to a coupled motion when the motions are operated at the same time [8,10]. Recent studies on parallel PIDMs have attained multi-DOF motions by using different modes of vibration under ultrasonic driving [8,[11][12][13][14][15], and studies on series PIDMs have achieved multi-DOF motions by avoiding coupled motions [4,5,16]. However, there are few studies on the coupled motion characteristics of the parallel impact PIDM [17,18].…”

Section: Introductionmentioning

confidence: 99%

Simulation of Motion Interactions of a 2-DOF Linear Piezoelectric Impact Drive Mechanism with a Single Friction Interface

et al. 2018

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A two-degrees-of-freedom (2-DOF) linear piezoelectric impact drive mechanism (PIDM) is actuated by two independent piezoelectric actuators (PAs). The coupled motion interactions of a two orthogonal DOF linear PIDM with a single friction interface are introduced and analyzed. A complete dynamic model of the 2-DOF PIDM is established with the Karnopp friction model considering the distribution of friction in the x-axis and y-axis. The output displacements of the 2-DOF PIDM and two corresponding independent 1-DOF PIDMs are investigated numerically. When the two input exciting signals of a 2-DOF PIDM have the same driving voltage of 100 V with a duty ratio of 98% at 10 Hz and two 1-DOF PIDMs are driving under the same conditions, the step displacements in the two axes of 2-DOF PIDM are improved compared to the corresponding 1-DOF PIDM. When the two input exciting signals of a 2-DOF PIDM have the same driving voltages of 100 V with a duty ratio of 98% but the driving frequency is 10 Hz in the x-axis and 20 Hz in the y-axis, the results show that the displacement of high frequency achieves a slight decrease and displacement of low frequency shows a large increase compared to the two corresponding 1-DOF PIDMs.

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A two degrees-of-freedom piezoelectric single-crystal micromotor

Cited by 40 publications

References 22 publications

Review: Recent Advances in Micromotors

Review: Recent Advances in Micromotors

A Piezoelectric and Electromagnetic Dual Mechanism Multimodal Linear Actuator for Generating Macro- and Nanomotion

Simulation of Motion Interactions of a 2-DOF Linear Piezoelectric Impact Drive Mechanism with a Single Friction Interface

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