A high-temperature MEMS heater using suspended silicon structures

Lee, Kook-Nyung; Lee, Daesung; Jung, Sungwon; Jang, Yun-Ho; Kim, Yong-Kweon; Seong, Woo

doi:10.1088/0960-1317/19/11/115011

Cited by 51 publications

(36 citation statements)

References 19 publications

(32 reference statements)

Supporting

Mentioning

Contrasting

Order By: Relevance

“…With similar structure, we have already showed high temperature operating micro heater which has Ti/Pt heat resistor deposited on the insulated suspended silicon filaments. [12] …”

Section: Methodsmentioning

confidence: 99%

Fabrication of Metal Nanobridge Arrays using Sacrificial Silicon Nanowire

Lee¹,

Lee²,

Jung³

et al. 2012

Journal of Electrical Engineering and Technology

Self Cite

View full text Add to dashboard Cite

-Novel fabrication method of nanobridge array of various materials was proposed using suspended silicon nanowire array as a sacrificial template structure. Nanobridges of various materials can be simply fabricated by direct deposition with thermal evaporation on the top of prefabricated suspended silicon nanobridge arrays, which are used as a sacrificial structure. Since silicon nanowire can be easily removed by selective dry etching, nanobridge arrays of an intended material are finally obtained. In this paper, metal nanobridges of Ti/Au, around 50-200 nm in thickness and width, 5-20 μm in length were fabricated to prove the advantages of the proposed nanowire or nanobridge fabrication method. The nanobridges of Ti/Au after complete removal of sacrificial silicon nanowire template were well-established and bending of nanobridge caused by the tensile stress was observed after silicon removing. Up to 50 nm and 10 μm of silicon nanowire in diameter and length respectively was also very useful for nanowire templates.

show abstract

“…With similar structure, we have already showed high temperature operating micro heater which has Ti/Pt heat resistor deposited on the insulated suspended silicon filaments. [12] …”

Section: Methodsmentioning

confidence: 99%

Fabrication of Metal Nanobridge Arrays using Sacrificial Silicon Nanowire

Lee¹,

Lee²,

Jung³

et al. 2012

Journal of Electrical Engineering and Technology

Self Cite

View full text Add to dashboard Cite

show abstract

“…We evaluated the temperature behavior for T < 400 °C and used a second order approximation. For higher temperature higher orders may play a role and further calibration may be required [25,26]. The R ( T ) equation is:

R (T) = R_{0} [1 + α (T - T_{0}) + β {(T - T_{0})}^{2}]

where R ( T ) is the resistance measured at temperature T and R 0 is the resistance value at reference temperature T 0 .…”

Section: Micro-system Design and Fabricationmentioning

confidence: 99%

Heater-Integrated Cantilevers for Nano-Samples Thermogravimetric Analysis

Toffoli

Carrato

Lee

et al. 2013

Sensors

View full text Add to dashboard Cite

The design and characteristics of a micro-system for thermogravimetric analysis (TGA) in which heater, temperature sensor and mass sensor are integrated into a single device are presented. The system consists of a suspended cantilever that incorporates a microfabricated resistor, used as both heater and thermometer. A three-dimensional finite element analysis was used to define the structure parameters. TGA sensors were fabricated by standard microlithographic techniques and tested using milli-Q water and polyurethane microcapsule. The results demonstrated that our approach provides a faster and more sensitive TGA with respect to commercial systems.

show abstract

“…1. Shikida et al 2006; deep grooves, Sato et al 1998; (c) mass-spring systems for accelerometers, Butefisch et al 2000; grooves for the optical fibre alignment, Hoffmann et al 2002; (e) cantilever beam; (f) suspended filament beams as MEMS heaters, Lee et al 2009.…”

Section: Wet Anisotropic Etching In Memsmentioning

confidence: 99%