A High-Speed Large-Range Tip-Tilt-Piston Micromirror Array

Hopkins, Jonathan B.; Panas, Robert M.; Song, Yuanping; White, Carolyn D.

doi:10.1109/jmems.2016.2628723

Cited by 28 publications

(10 citation statements)

References 29 publications

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“…Therefore, a micromirror with a natural frequency of 10 kHz can switch in under 10 µs. These kinds of frequencies are relatively common for a scanning electrostatic mirror [28,29]. Figure 3(d) shows that in order to keep the error under 1% (θ err or = 0.01) one needs timing precision of 15 ns (0.00015T 0 ).…”

Section: Analog Controlmentioning

confidence: 99%

Open loop control theory algorithms for high-speed 3D MEMS optical switches

et al. 2020

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There is a worldwide push to create the next generation all-optical transmission and switching technologies for exascale data centers. In this paper we focus on the switching fabrics. Many different types of 2D architectures are being explored including MEMS/waveguides and semiconductor optical amplifiers. However, these tend to suffer from high, path dependent losses and crosstalk issues. The technologies with the best optical properties demonstrated to date in large fabrics (>100 ports) are 3D MEMS beam steering approaches. These have low average insertion losses, and equally important, a narrow loss distribution. However, 3D MEMS fabrics are generally dismissed from serious consideration for this application because of their slow switching speeds (∼few milliseconds) and costs ($100/port). In this paper we show how novel feedforward open loop controls can solve both problems by improving switching speeds by two orders of magnitude and costs by one order of magnitude. With these improvements in hand, we believe 3D MEMS fabrics can become the technology of choice for data centers.

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Section: Analog Controlmentioning

confidence: 99%

Open loop control theory algorithms for high-speed 3D MEMS optical switches

et al. 2020

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“…Figure 13.1.5 shows a biphase architected cellular material that can be designed for negative CTE [21]. At smaller scale, these materials would be useful for applications where dimensional accuracy is essential under continuous temperature excursions (e.g., positioning of micromirrors in space applications [42]). If the CTE of phase I is larger than that of phase II, and the angle θ is sufficiently large, the net result will be a biaxial contraction of the unit cell, that is, negative effective CTE.…”

Section: Negative Poisson's Ratio and Negative Coefficient Of Thermalmentioning

confidence: 99%

Fabrication of 3D Micro-Architected/Nano-Architected Materials

Valdevit

Bauer

2016

Three-Dimensional Microfabrication Using Two-Photon Polymerization

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“…Electrostatic actuation is capable of faster actuation but generates lower forces than electrothermal, where the electrothermal speed is limited by the thermal dynamics of the system. The lower forces in electrostatic actuation require special attention in the design to achieve large displacement, as shown in [ 1 , 23 ]. Additionally, electrostatic actuation consumes low input power (due to the low consumption of current) for full actuation but typically requires high voltages (>100 V) to generate the forces capable of producing large displacement, as presented by Ozdogan et al [ 21 ].…”

Section: Introductionmentioning

confidence: 99%

Design, Simulation, Fabrication, and Characterization of an Electrothermal Tip-Tilt-Piston Large Angle Micromirror for High Fill Factor Segmented Optical Arrays

et al. 2021

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Micro-electromechanical system (MEMS) micromirrors have been in development for many years, but the ability to steer beams to angles larger than 20° remains a challenging endeavor. This paper details a MEMS micromirror device capable of achieving large motion for both tip/tilt angles and piston motion. The device consists of an electrothermal actuation assembly fabricated from a carefully patterned multilayer thin-film stack (SiO2/Al/SiO2) that is epoxy bonded to a 1 mm2 Au coated micromirror fabricated from an SOI wafer. The actuation assembly consists of four identical actuators, each comprised of a series of beams that use the inherent residual stresses and coefficient of thermal expansion (CTE) mismatches of the selected thin films to enable the large, upward, out-of-plane deflections necessary for large-angle beamsteering. Finite element simulations were performed (COMSOL v5.5) to capture initial elevations and tip/tilt motion displacements and achieved <10% variance in comparison to the experiment. The measured performance metrics of the micromirror include tip/tilt angles of ±23°, piston motion of 127 µm at sub-resonance, and dynamics characterization with observed resonant frequencies at ~145 Hz and ~226 Hz, for tip/tilt and piston motion, respectively. This unique single element design can readily be scaled into a full segmented micromirror array exhibiting an optical fill-factor >85%, making it suitable for optical phased array beam control applications.

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A High-Speed Large-Range Tip-Tilt-Piston Micromirror Array

Cited by 28 publications

References 29 publications

Open loop control theory algorithms for high-speed 3D MEMS optical switches

Open loop control theory algorithms for high-speed 3D MEMS optical switches

Fabrication of 3D Micro-Architected/Nano-Architected Materials

Design, Simulation, Fabrication, and Characterization of an Electrothermal Tip-Tilt-Piston Large Angle Micromirror for High Fill Factor Segmented Optical Arrays

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