A High-sensitivity, Small-size Resonant Pressure Microsensor Based on Optimized Resonator-diaphragm Structure

Lu, Yulan; Zhang, Sen; Li, Yadong; Xie, Bin; Chen, Deyong; Wang, Junbo; Chen, Jian

doi:10.1109/nems.2019.8915640

Cited by 2 publications

(2 citation statements)

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“…Guzman Cervantes et al [ 81 ] (2013) at the National Institute of Standards and Technology designed an optical MEMS accelerometer based on Fabry–Pérot (FP) sensing [ 82 , 83 , 84 ], which combined a monolithic fused-silica oscillator and a fiber-optic micro-cavity into an absolute reference accelerometer. A noise floor of 100 ng/√Hz over a bandwidth of 10 kHz was achieved above 1.5 kHz.…”

Section: Mems Accelerometers With Signal Readout Methods Of Highermentioning

confidence: 99%

“…Schematic diagram of the single axis out-of-plane optical MEMS accelerometer developed by Lu et al at Zhejiang University [77].Guzman Cervantes et al[81] (2013) at the National Institute of Standards and Technology designed an optical MEMS accelerometer based on Fabry-Pérot (FP) sensing[82][83][84], which combined a monolithic fused-silica oscillator and a fiber-optic micro-cavity into an absolute reference accelerometer.A noise floor of 100 ng/ √ Hz over a bandwidth of 10 kHz was achieved above 1.5 kHz. A noise floor of better than 10 ng/ √ Hz over a bandwidth of 2 kHz was achieved above 9 kHz.…”

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confidence: 99%

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Micromachined Accelerometers with Sub-µg/√Hz Noise Floor: A Review

Wang

Chen

Wang

et al. 2020

Sensors

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This paper reviews the research and development of micromachined accelerometers with a noise floor lower than 1 µg/√Hz. Firstly, the basic working principle of micromachined accelerometers is introduced. Then, different methods of reducing the noise floor of micromachined accelerometers are analyzed. Different types of micromachined accelerometers with a noise floor below 1 µg/√Hz are discussed. Such sensors can mainly be categorized into: (i) micromachined accelerometers with a low spring constant; (ii) with a large proof mass; (iii) with a high quality factor; (iv) with a low noise interface circuit; (v) with sensing schemes leading to a high scale factor. Finally, the characteristics of various micromachined accelerometers and their trends are discussed and investigated.

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