A High-sensitivity Optical MEMS Accelerometer based on SOI Double-side Micromachining

Qu, Ziqiang; Liu, Huafeng; Ou-Yang, H. Daniel; Hu, Chenyuan; Tu, Liangcheng

doi:10.1109/sensors47125.2020.9278761

Cited by 9 publications

(4 citation statements)

References 11 publications

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“…[26] Qu et al proposed a high-sensitivity fiber FP MEMS accelerometer machined by SOI double-sided micromachining technology (Figure 7b), whose noise floor and sensitivity are 2.4 ng Hz −1/2 @10 Hz and 3165 V g −1 . [1,25] The fiber FP accelerometer can easily realize differential, dualaxis, and closed-loop detection through sensing chip design. Taghavi et al designed FP cavities between the cross-section of the inertial mass and the ends of the two split fibers in the X and Y direction, respectively, to detect acceleration in both directions, as shown in Figure 8a.…”

Section: Fabry-perot Accelerometermentioning

confidence: 99%

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Optical Interferometric MEMS Accelerometers

Zhao,

Qi,

Wang

et al. 2023

Laser & Photonics Reviews

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Laser interferometry is one of the most accurate measurement technologies whose displacement resolution can reach the femtometer (fm) level. With the development of Micro‐Electro‐Mechanical Systems(MEMS) technology, many excellent optical interferometric MEMS sensors have emerged, which play an essential role in intelligent manufacturing, aerospace, and many other fields. Among them, optical interferometric MEMS accelerometers develop rapidly due to their high sensitivity, low noise, and anti‐electromagnetic interference advantages. Lots of research in optical interferometric chip design, micro‐nano fabrication process, signal demodulation algorithm, and range extension technology are performed, and different types of MEMS accelerometers based on the optical interferometric principles are developed, which have been demonstrated and applied in the fields of disaster monitoring, equipment operation and maintenance, and resource exploration. This paper reviews the development status of optical interferometric MEMS accelerometers, mainly focusing on the critical problems and solutions that need to be solved in the development process of optical interferometric accelerometers, and finally introduces the typical application scenarios.

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Section: Fabry-perot Accelerometermentioning

confidence: 99%

“…proposed a high‐sensitivity fiber FP MEMS accelerometer machined by SOI double‐sided micromachining technology (Figure 7b), whose noise floor and sensitivity are 2.4 ng Hz −1/2 @10 Hz and 3165 V g −1 . [ 1,25 ]…”

Section: Classifications Of Optical Interferometric Mems Accelerometermentioning

confidence: 99%

Optical Interferometric MEMS Accelerometers

Zhao,

Qi,

Wang

et al. 2023

Laser & Photonics Reviews

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“…To increase the flexibility of the accelerometers, the straight beams are folded, and to have symmetry, they are used at four corners of the proof mass called folded-beam and crab-leg beams [12]. The suspension beam has also been used in the form of an in-plane frame around the proof mass and parallel to the fixed frame [13].…”

Section: Introductionmentioning

confidence: 99%

Analytical modeling of an inclined folded-beam spring used in micromechanical resonator devices

Rahbar Ranji,

Li,

Alirezaee

et al. 2023

Eng. Res. Express

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Accurate estimation of the mechanical behavior of springs is crucial for the proper design of Microelectormechanical systems (MEMS). The main objective of this study is to derive a closed-form equation for the calculation of the stiffness of an inclined spring in the form of folded beams. The energy-based method was used to calculate the displacements of a folded beam that was fixed at one end and giuded at the other end. The analytical model was then compared with the finite element method using ANSYS for different inclination angles of the folded beam spring, showing good agreement. The angle on inclination has changed from zero to 180 degress, and stiffness of folded beam is detemined. The derived expressions of the compliances were checked for the case of serpentine springs with inclination angle of zero, and different length ratios against the literature. It is found that neglecting small lengths for calculating the stiffness of the folded beam spring is not justified. The influential geometrical parameters, including different lengths of the spring and inclination angle of the spring, on the stiffness are studied. It is found that the angle of inclination of the principal axes of spring constants depends on the geometrical parameters, and the angle of inclination has more effect on the stiffness of a folded beam spring than the number of folds.

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“…Ziqiang Qu et al from Huazhong University of Science and Technology proposed a MEMS seismograph with optical interferometer. The test results shown that the noise power spectral density of 100 ng/√Hz@1Hz and resonant frequency of 31Hz [15] . Charles W. Lewandowski et al from Montana State University reported a microsphere seismograph with resonant frequency of 1.75 Hz, the test results showed that the noise power spectral density is 36 ng/√Hz@0.5Hz [16] .…”

mentioning

confidence: 99%

A Low-noise MEMS Seismograph Based on Symmetric Buckling Beams

Che,

Wang,

et al. 2024

Preprint

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MEMS seismographs are able to achieve lower noise performance by increasing the mass, reducing the resonant frequency, and increasing the quality factor (Q), which allows they can be used in the field of seismology. In this design, we propose a novel beam-mass design that incorporating two types of buckling beams (BBs), one of which will exhibits negative stiffness characteristic when the gravity of the proof mass is greater than its buckling load, while the other still exhibits positive stiffness characteristic. Through effective stiffness compensation, simulation results show that this MEMS seismograph owns a quasi-zero stiffness characteristic (0.15 N/m) and a low resonant frequency of 8.89 Hz. Previous studies of positive stiffness beams usually used folded beams, curved-beams with single-end constraints, etc, however, it is important to note that changes in the width of beams by the microfabrication directly impact the stiffness characteristic of the MEMS seismographs, and may even result in the loss of quasi-zero stiffness characteristics. Nevertheless, the simulation results of our design reveal that this MEMS seismograph maintain a quasi-zero stiffness characteristics and low resonant frequency (<10 Hz) within an angle from the horizontal (2.7° - 177.3°), although the width of BBs is smaller than the specified dimensions because of the effects of microfabrication errors. Finally, comprehensive testing reveals that this MEMS seismograph possesses a resonant frequency of 8.6 Hz at an angle of 84° from the horizontal, noise power spectral density of 20 ng/√Hz from 0.42 Hz to 3 Hz.

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A High-sensitivity Optical MEMS Accelerometer based on SOI Double-side Micromachining

Cited by 9 publications

References 11 publications

Optical Interferometric MEMS Accelerometers

Optical Interferometric MEMS Accelerometers

Analytical modeling of an inclined folded-beam spring used in micromechanical resonator devices

A Low-noise MEMS Seismograph Based on Symmetric Buckling Beams

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