A Low-noise MEMS Seismograph Based on Symmetric Buckling Beams
Lufeng Che,
Weidong Wang,
minghong qi
et al.
Abstract:MEMS seismographs are able to achieve lower noise performance by increasing the mass, reducing the resonant frequency, and increasing the quality factor (Q), which allows they can be used in the field of seismology. In this design, we propose a novel beam-mass design that incorporating two types of buckling beams (BBs), one of which will exhibits negative stiffness characteristic when the gravity of the proof mass is greater than its buckling load, while the other still exhibits positive stiffness characterist… Show more
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