2020
DOI: 10.3390/s20030921
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A High Precision Time Grating Displacement Sensor Based on Temporal and Spatial Modulation of Light-Field

Abstract: A new displacement sensor with light-field modulation, named as time grating, was proposed in this study. The purpose of this study was to reduce the reliance on high-precision measurements on high-precision manufacturing. The proposed sensor uses a light source to produce an alternative light-field simultaneously for four groups of sinusoidal light transmission surfaces. Using the four orthogonally alternative light-fields as the carrier to synthesize a traveling wave signal which makes the object movement in… Show more

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Cited by 9 publications
(4 citation statements)
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References 28 publications
(28 reference statements)
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“…According to the idea of "space-time coordinate conversion," a coordinate system of uniform motion is the key to measure space with time [19]. e traveling wave can be divided into the space traveling waves and the time traveling waves by the time grating sensors.…”
Section: Operation Principle Of Time Grating Sensormentioning
confidence: 99%
“…According to the idea of "space-time coordinate conversion," a coordinate system of uniform motion is the key to measure space with time [19]. e traveling wave can be divided into the space traveling waves and the time traveling waves by the time grating sensors.…”
Section: Operation Principle Of Time Grating Sensormentioning
confidence: 99%
“…They proposed a time grating sensor for long-distance, nanoscale precision measurement. They proposed a time grating sensor for longdistance, nanoscale precision measurement [13]. This sensor uses high-frequency clock pulses as the measurement standard, and calculates the change in capacitance value through a proportional relationship between the relative displacement and the capacitance change between fixed and moving rulers, and calculates the displacement change [14].…”
Section: Introductionmentioning
confidence: 99%
“…The difference with the above sensors is that reduce the processing requirement of grating lines. At the moment, the time-grating inductive sensor, the time-grating capacitive sensor, and the time-grating moving light field sensor [20][21][22][23][24][25][26] have been suitable for industrial production and applications (e.g. rotary table for small and medium-sized machine tool, the high-speed servo motor).…”
Section: Introductionmentioning
confidence: 99%