A high-precision five-degree-of-freedom measurement system based on laser collimator and interferometry techniques

Abstract

A novel sensitivity improving method for simultaneously measuring five-degree-of-freedom errors of a moving linear stage is proposed based on collimator and interferometry techniques. The measuring principle and parameters of the system are analyzed theoretically. The experimental results proved that the resolution of the linear displacement of the proposed method has twice that of the current linear interferometer, and the resolutions of the two-dimensional straightness error measurement can be improved by a factor of 8 compared with the movement of the retroreflector itself by using multireflection and lens magnification. The resolutions of the pitch and yaw angular error measurement have been improved by a factor of 10 compared with the rotation of the plane mirror itself by using expander lenses. The whole measuring system is characterized of simple structure, small volume, and high precision. The moving component of the measurement system is wireless, which eliminates the errors and inconvenience introduced by the wire connection. Calibration and comparison tests of this system compared with Renishaw laser interferometer system have been carried out. Experimental results show good consistency for measuring a linear guide way.

Compensation for straightness measurement systematic errors in six degree-of-freedom motion error simultaneous measurement system

“…Multi degree-of-freedom (DOF) error simultaneous measurement method and system is urgently needed and preferably adopted in machine tool calibration due to its high efficiency and easy assembly [1][2][3][4][5][6][7][8][9][10]. A simple system for simultaneously measuring six DOF geometric motion errors of a linear guide was developed in our previous work [11].…”

A method for measuring the guideway straightness error based on polarized interference principle

“…The first one is to use light intensity as reference in the measurement. Increasing progress was made in measurement accuracy; the measurement dimension was increased using PSD or multi-dimensional CCD in the last few years [7][8][9]. However, in the case of long-range measurement, the accuracy is affected by laser diffraction and environmental condition.…”

“…Various methods are adopted in the industrial measurement field [1][2][3][4][5]. Laser alignment measurement has been gaining more attention due to its convenience and high accuracy [6][7][8][9][10]. There are three types classified by reference [6].…”

The analysis and measurement of motion errors of the linear slide in fast tool servo diamond turning machine

“…Increasing progress is made in measurement accuracy; the measurement dimension is increased using position sensitive device (PSD) or multi-dimensional charge-coupled device (CCD) in recent years. [24][25][26] However, in the case of long-range measurement, the accuracy is affected by laser diffraction and environmental condition.…”

“…Based on the reference of optical measurement, it can be classified into three types. [18][19][20][21][22][23][24][25][26] The first method is laser interferometry measurement applied by the light phase as reference. This method is performed by measuring the variation of interference fringes of the lasers reflected by the upper and the lower edges of a wedge.…”