Digest. International Electron Devices Meeting,
DOI: 10.1109/iedm.2002.1175865
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A high performance 90nm SOI technology with 0.992 μm/sup 2/ 6T-SRAM cell

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Cited by 34 publications
(8 citation statements)
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“…Table 1 shows the base parameters used in this study (note that Vdd and Id values are taken from [15], [16]). Values of interconnect pitch of metal layers in various 130nm and 90nm technologies are given in Table 2 [15], [16], [17], [18], [19], [20]. The global interconnect pitch of ITRS is twice the minimum value from ITRS [6].…”
Section: Via Blockagementioning
confidence: 99%
“…Table 1 shows the base parameters used in this study (note that Vdd and Id values are taken from [15], [16]). Values of interconnect pitch of metal layers in various 130nm and 90nm technologies are given in Table 2 [15], [16], [17], [18], [19], [20]. The global interconnect pitch of ITRS is twice the minimum value from ITRS [6].…”
Section: Via Blockagementioning
confidence: 99%
“…The 8T bit-cell adds 38 % area overhead relatively to the 6T cell. In more scaled CMOS technology such as 65 nm, 45 nm and beyond, the thin cell layout approach [12] might be effective to reduce the lithographic mismatch. But the area overhead may be remained in a same degree since both 6T and 8T cells will be scaled in asame way.…”
mentioning
confidence: 99%
“…The circuit has been fabricated in a 90nm partially depleted digital CMOS SOI technology [6]. The test chip also contains a shift register to provide digital settings, and two inverter-based output buffers.…”
Section: Measurement Resultsmentioning
confidence: 99%