Nuclear Instruments and Methods in Physics Research Section B:
1987
DOI: 10.1016/0168-583x(87)90853-6
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A high current injector for tandem accelerators

John P. O’Connor1,
Leo F. Joyce2
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Cited by 3 publications
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Ion Implanters

Rimini1
1995
Ion Implantation: Basics to Device Fabrication
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Ion Implanters

Rimini1
1995
Ion Implantation: Basics to Device Fabrication
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An INTRODUCTION TO ION SOURCES

Stephens
1
1988
Ion Implantation Science and Technology
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Bernas ion source for Genus Tandetron ion implanters

Sakase1,
Maciejowski2,
Leavitt3
et al.
Proceedings of 11th International Conference on Ion Implantation Technology
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